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Brochures-Analyzers for Wet Process
HE-960TM
TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations
The HE-960TM offers high precision measurement of the conductivity of TMAH (Tetra Methyl Ammonium Hydroxide) solutions, the main component of the photoresist developer that is used in semiconductor and liquid crystal processes.
The HE-960TM is also an environmentally-friendly product that uses lead-free solder for mounting chips on the PCB. And, with its 4-electrode FES-126Ni dedicated sensor, this unit has a high chemical resistance and offers a wide range of measurement, perfect conditions for measuring TMAH.
Segment: Semiconductor
Division: Wet Process Control
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
- Wide measurement range
- Sutable temperature compensation for TMAH solution
- Temperature measurement, simultaneous display function
- Free transmission output range
- Utilization of lead-free solder
- CE Marking compliant
| Model | HE-960TM | ||
|---|---|---|---|
| Power supply | Rated voltage 100 V to 240 V AC, 50/60 Hz, 10 VA (max.) | ||
| Structure | Indoor-use panel installation type Panel: IP65 dust and water proof structure | ||
| Protective structure | Panel: IP65 (IEC60529, JIS C0920) | ||
| Conforming standards | CE Marking FCC Rule | ||
| External dimensions | 96 (W) mm x 96 (H) mm x 115 (D) mm Case depth: approx. 105 mm (when panel-mounted) | ||
| Mass | Approx. 500 g | ||
| Compatible sensors | FES-126Ni conductivity sensor | ||
