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"Measurement" is significant to keep the environment conservation.

HORIBA's measuring techniques contribute to the safe and secure work environment such as clean room, water discharge, and air ventilation.

Facilities includes: 

  • Clean Room Solution
  • Ultra Pure Water
  • Exhaust Gas
  • Waste Water Treatment


Clean Room Solutions

Semiconductor Processing - Clean Room

Ultra Pure Water

Waste Water Treatment

Exhaust Gas

Related Products


Pressure Insensitive Mass Flow Module

more SEC-E Series

Mass Flow Controller

more SEC-N100 Series

Digital Mass Flow Controller

more SEC-Z700S Series

New concept Pressure Insensitive Mass Flow Controller

more VG Series

Capacitance Manometer

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