
POCl3 Auto Refill System
HORIBA's Award Winning Fluid Delivery System (LU-4000 Series) has revolutionised the POCl3 diffusion process by developing a system to automatically deliver bulk liquid POCl3 in 20 litre ETFE lined stainless steel canisters to multiple fixed plastic bubbler vessels.
The LU-4000 series and VM series are used for n-type diffusion layers as a dopant in manufacturing crystal silicon-based solar cell.
The system can also be used in the BBr3 diffusion process, improving process stability, increasing uptime, reducing logistics and labour costs and higher safety.
Liquids supported | POCl3, BBr3. Liquids compatible with pfa and ptfe |
Process lines | 4 x independent Coaxial, N2 purged process lines to deliver liquid to 4 x furnaces |
Liquid line connections | All liquid line connections are housed inside cabinets that are connected to facility exhaust |
Delivery distance limit | Total length of supply/return line 50m |
Differential pressure sensor with alarm | Check for cabinet or Coaxial tubing leaks |
Leak detection | Integrated liquid and gas leak detection |
Over pressure protection | Safety burst disk |
Supply method | Pressurise bulk canister |
Bulk canister | Maximum 38 L (see diagram for dimensions) |
Receiving system | Maximum 20 HORIBA VM Advanced Bubblers |
Wetted parts | PFA and PTFE |
Pressure Measurement points | 1. Operation line 1 MPa(G) F.S. 2. Purge line 500 kPa(G) F.S. 3. Bulk canister and pressurised leak check of wetted parts 300 kPa(G) F.S. 4. Vacuum leak test and purge check function 100 kPa(A) F.S. |
Liquid removal method | Automatic N2 and vacuum cycle purge with automatic purge check function |
Communications | EtherNET communication between refill system and HORIBA Advanced Bubbler VM |
Bulk canister scale | 0 to 100 kg (gross) |
Noise | <60 dB (A) at 1 m |
Working environment | 15˚C to 35˚C ≤ 85% relative humidity |
Width | 1200 mm |
Depth | 605 mm |
Height (including light tower) | 2635 mm |
Weight | 375 kg |
Safety standards | CE, designed to SEMI S2 |
Power requirements | 100~240 VAC 50/60 Hz 6 A ~ 12 A |
Canister Dimensions
*subject to change
Automatic Refill System (LU-4000) Features:
Bubbler (VM) Features:
Liquid temperature is measured in the VM. The flow algorithm calculates the required carrier gas flow through the bubbler based on the measurement of temperature, pressure and vapor pressure.
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