SEC-400 Series

Mass flow controllers SEC-400 series

Mass Flow Controller

The SEC-400 series mass flow controller is used in a wide variety of industries and markets all over the world. It is installed with thermal valves and offers reliable control capabilities.

 

Segment: Semiconductor
Division: Fluid Control
Manufacturing Company: HORIBA STEC, Co., Ltd.
  • High accuracy: +/- 0.5% F.S.:SEC-405 (limited gas compatibility)
  • Wide range of flow rate control: from 0.1 CCM to 200 SLM (N2)                                   
  • Low cost models are available: cost effective model: SEC-400MK3/500MK3.

 

 

SEC-400 Specifications

External Dimension

Gas Mass Flow Control and Measurement in Research and Testing Laboratories
Gas Mass Flow Control and Measurement in Research and Testing Laboratories

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