HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

A concentration monitor ideal for high-precision measurements of low-concentration hydrofluoric acid, hydrochloric acid, and ammonia.

With a sensor that has excellent corrosion resistance, it can accurately and quickly measure low concentrations of hydrofluoric acid, hydrochloric acid as well as ammonia. This makes it ideal for single wafer cleaning and batch cleaning applications.

Segment: Semiconductor

Division: Wet Process Control

Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Compatible with five types of measurements
Accommodating five types of measurements: HF concentration, HCl concentration, NH₃ concentration, conductivity, and temperature. For HF concentration, HCl concentration, and NH₃ concentration, temperature compensation measurements are conducted based on their respective temperature characteristic data.

Accurate measurements with high reproducibility of low-concentration HF Concentration
Measurement is possible with high reproducibility within ±25ppm. The display resolution is equivalent to 0.5%, which is 5000ppm. Catering to low-concentration requirements by providing ppm-level readings.

Abundant output options
Able to provide a wide range of outputs, not only for upper and lower concentration limits but also for concentration abnormalities and abnormal sample measurement outputs. (7 output points)

Analog output can be set arbitrarily within the concentration measurement range
It is possible to set the analog output range within the measurement range of 0-200%, allowing for a finer output of concentration values.

Concentration conversion function
Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with temperature characteristics. It is particularly suitable for the dilution management of low-concentration chemical solutions.

Product name	Low Concentration Type HF / HCl / NH₃ Concentration Monitor
Model	HF-960M
Measurement range	HF: 0 - 5000 ppm, HCl: 0 - 5000 ppm, NH₃: 0 - 10000 ppm, Conductivity:0 - 50.0 mS/cm
Power supply	Rated voltage 24 V DC, 10 W (max)
Structure	Iindoor-use, panel installation type, panel case : ABS, terminal : PBT, Panel : IP65 dust and water proof structure
External dimensions	96 (W) x 96 (H) x 115 (D) mm, Case depth : approx.105 (when panel-mounted)
Weight	Approx. 550 g
Conforming standards	CE marking, FCC Part15
Compatible sensors	FS-10F series flow-type sensor