Semiconductor Facility

Ultrapure Water ❯

Semiconductor Plant Wastewater Treatment ❯

Ultrapure Water

Ultra-pure water is a high-purity water that minimizes impurities and brings them closer to H2O as much as possible. It is used in a variety of applications, including cleaning processes for semiconductor devices and flat panel displays (FDPs), and steam generators for power generation turbines. This ultrapure water is then manufactured through many processes, including demineralization, ion exchange, and multiple membrane treatment. HORIBA offers a wide lineup of high-precision meters required for the production and purity control of ultra-pure water in a wide range of applications.

Highly sensitive silica monitor for ultra-pure water management in semiconductor/FPD processes

Semiconductor Panel Mount 48/96 Series

  • Model
  • Measurement Range
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  • HE-480R(W)0−100.0 MΩ・cm (before temperature compensation)
  • HE-960R-GC0−100.0 MΩ・cm (before temperature compensation)
    Number of connected sensors: 1ch compatible
  • HE-960RW-GC0−100.0 MΩ・cm (before temperature compensation)
    Number of connected sensors:  2ch compatible

Semiconductor Plant Wastewater Treatment

Water is used in the semiconductor production process, and the water which is used is discharged from the factory. Wastewater from semiconductor factories can have a significant impact on the aquatic environment such as rivers, lakes, and oceans, so appropriate treatment and management are necessary. Furthermore, this wastewater can be categorized into organic wastewater and inorganic wastewater, each requiring different treatment methods. HORIBA contributes to wastewater treatment with a lineup of measurement instruments and sensors that can address various types of wastewater.

Automatic total nitrogen/phosphorus monitor

Automatic COD monitor

Organic pollutant monitor

Oil concentration meter

Oil concentration meter

Laser scanning oil film detector

Interface level meter

H-1 Series (Field-Installation Type)

  • Model
  • Specifications
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48/96 Series (Panel Mount Type)

  • Model
  • Specifications
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  • HP-4804 Wire
  • HP-480PL4 Wire, Pulse-proportional Control
  • HP-480TP4 Wire, Time Division Proportional Control
  • HP-960FTP4 Wire, 4-point Alarm, Time Division Proportional Control
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LAQUA

The water quality meter brand, consolidated with HORIBA's technology. Available in tabletop, portable, and compact models. From the laboratory to the field, it caters to every need in all situations and applications.

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