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Dry Etching

Dry etching refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of ions (usually a plasma of reactive gases such as fluorocarbons, oxygen, chlorine, boron trichloride; sometimes with addition of nitrogen, argon, helium and other gases) that dislodge portions of the material from the exposed surface. A common type of dry etching is reactive-ion etching. Unlike with many (but not all, see isotropic etching) of the wet chemical etchants used in wet etching, the dry etching process typically etches directionally or anisotropically.

Fluid Controller & Module

D700MG
D700MG

High Speed & Precision Pressure Insensitive Mass Flow Module

D700WR
D700WR

Wide Range Pressure Insensitive Mass Flow Module

CRITERION D500
CRITERION D500

Pressure Insensitive Mass Flow Module

DZ-100
DZ-100

Ultra-thin Mass Flow Controller

FS-3000
FS-3000

Thermal Flow Splitter

SEC-Z700S Series
SEC-Z700S Series

New concept Pressure Insensitive Mass Flow Module

XF Series
XF Series

Digital Liquid Mass Flow Meters

Process Monitor & Endpoint Detector

Micropole System QL Series
Micropole System QL Series

Quadrupole Mass Analyzer

VG-200S
VG-200S

Capacitance Manometer

EV 2.0 Series
EV 2.0 Series

X선 분석 현미경 초대형 챔버 모델

EV-140C
EV-140C

Optical Emission Spectroscopy Etching End-point Monitor

LEM Series
LEM Series

Camera Endpoint Monitor based on Real Time Laser Interferometry

VS70-MC
VS70-MC

Miniature Multi Communication UV-NIR Spectrometer

OES-Star
OES-Star

UV-VIS-NIR Spectrometer

PoliSpectra® M116 MultiTrack Spectrometer
PoliSpectra® M116 MultiTrack Spectrometer

Multispectra, Multifiber, Multichannel Imaging spectrometer with 8-16-32 Simultaneous UV-NIR Spectra

VU90 Spectrometer
VU90 Spectrometer

Most Compact Vacuum UV Back-Illuminated CCD Spectrometer (VUV-FUV)

RU-1000
RU-1000

Plasma Emission Controller

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