LU-4000 Series

POCl3 Auto Refill System

LU-4000 시리즈POCl3 자동 리필 시스템호리바의 수상 수상 유체 전달 시스템(LU-4000 시리즈)은 20리터 ETFE 라이닝 스테인리스 스틸 캐니스터에 담긴 벌크 액체 POCl3를 여러 개의 고정 플라스틱 버블러 용기에 자동으로 전달하는 시스템을 개발하여 POCl3 확산 과정에 혁명을 일으켰다.

상기 LU-4000 시리즈 및 VM 시리즈는 결정 실리콘계 태양전지 제조 시 도펀트로서 n형 확산층에 사용된다.
이 시스템은 BBr3 확산 프로세스에도 사용할 수 있으며, 공정 안정성 향상, 가동 시간 증가, 물류 및 인건비 절감 및 안전성이 향상됩니다.

Segment: Semiconductor

Division: Fluid Control System

Manufacturing Company: HORIBA STEC, Co., Ltd.

Higher productivity
The VM Series (Vapor Delivery Module) achieves higher productivity due to minimizing downtime as it does not require a traditional quartz bubbler exchange
Reduced running costs
The LU-4000 Series reduces consumption of POCl3: up to 30% lower price per kg
More than 99.8% uptime due to continuous production
Decrease the cost of POCl3 waste
Longer tool lifetime and lower maintenance costs due to the process line never being exposed to the atmosphere
Delivered by 20L canister reduces logistics, storage and handling costs
Fewer POCl3 exchanges and bottle returns result in lower labor costs
Improved process stability
The VM Series keeps the liquid level ”High” resulting in the pick-up rate being more stable than a traditional quartz bubbler
There is no affect by liquid level due to the bubbler being continually refilled
No bubbler exchanges are needed resulting in no exchange mistakes
There is no affect from ambient temperature fluctuactions
Sheet resistance is more stable than traditional bubblers resulting in improved sheet resistance repeatability and reproducibility.
Improved safety
No more quartz. The VM Series is made from PFA vessel which is much more robust than quartz, no handling, exchanges or refilling of quartz bubblers are needed as it does not require periodical exchanges resulting in less opportunities for human error.
POCl3 is delivered in 20L ETFE lined stainless steel containers and contained in fixed and robust PFA vessel.
Robust, leak tight bubbler housing with N2 blanket and connected to facility exhaust
Integrated liquid leak and gas leak detection
Wetted lines fully purged and leak checked automatically.
Improved reliability
POCl3 is hydrophilic and produces phosphoric acid which can cause corrosion or crystallization. A normal bubbler requires periodical exchanges and when a bubbler is exchanged the possibility of contact with air increases. The HORIBA POCl3 Auto Refill System does not require exchanges of the bubbler resulting in a very low chance that POCl3 tubing makes contacts with the air.

Liquids supported	POCl3, BBr3. Liquids compatible with pfa and ptfe
Process lines	4 x independent Coaxial, N2 purged process lines to deliver liquid to 4 x furnaces
Liquid line connections	All liquid line connections are housed inside cabinets that are connected to facility exhaust
Delivery distance limit	Total length of supply/return line 50m
Differential pressure sensor with alarm	Check for cabinet or Coaxial tubing leaks
Leak detection	Integrated liquid and gas leak detection
Over pressure protection	Safety burst disk
Supply method	Pressurise bulk canister
Bulk canister	Maximum 38 L (see diagram for dimensions)
Receiving system	Maximum 20 HORIBA VM Advanced Bubblers
Wetted parts	PFA and PTFE
Pressure Measurement points	1. Operation line 1 MPa(G) F.S. 2. Purge line 500 kPa(G) F.S. 3. Bulk canister and pressurised leak check of wetted parts 300 kPa(G) F.S. 4. Vacuum leak test and purge check function 100 kPa(A) F.S.
Liquid removal method	Automatic N2 and vacuum cycle purge with automatic purge check function
Communications	EtherNET communication between refill system and HORIBA Advanced Bubbler VM
Bulk canister scale	0 to 100 kg (gross)
Noise	<60 dB (A) at 1 m
Working environment	15˚C to 35˚C ≤ 85% relative humidity
Width	1200 mm
Depth	605 mm
Height (including light tower)	2635 mm
Weight	375 kg
Safety standards	CE, designed to SEMI S2
Power requirements	100~240 VAC 50/60 Hz 6 A ~ 12 A

Canister Dimensions

POCl3 Auto Refill System FDM Series

*subject to change

Automatic Refill System (LU-4000) Features:

Robust, sealed and exhausted housing
Cabinet differential pressure with alarm
Integrated gas leak detection
Touch panel user interface with remote access for troubleshooting
Lockable doors and slide out canister retainer with safety interlock
Canister scale
Integrated safety reservoir with liquid leak detection

Bubbler (VM) Features:

Liquid temperature is measured in the VM. The flow algorithm calculates the required carrier gas flow through the bubbler based on the measurement of temperature, pressure and vapor pressure.