Direct Injection Innovator Teams Up With Market Leader to Extend CVD and ALD Advanced Process Offering

2014년9월 9일

Direct Injection Innovator Team

From left to right: Takuya Ito; HORIBASTEC Sales, Shigeji Ao; HORIBA Senior Applications Engineer, Stuart Knight; HORIBA European Segment VP, Jean Manuel Decams; Kemstream President, Herve Guillon; Kemstream Sales Manager, Samuel Bonnafous; Kemstream Engineering Director

Advanced Direct Liquid Injection manufacturer Kemstream, enters into a sales collaboration agreement with the market leader HORIBA.

“As the recognized leader in flow and vapor control to the semiconductor industry HORIBASTEC is working together with its customers to develop products to deliver next generation precursors to the process chamber. We are very happy now to also bring Kemstream’s extensive expertise in advanced direct liquid injection technology to our customers”, comments Stuart Knight, HORIBA’s Europe VP. “HORIBA’s vaporizer product range will be complemented by Kemstream’s direct liquid injection products which will help us meet the unique demands of next generation solid precursors”.

HORIBASTEC, the world leader for semiconductor manufacturing industries, offers customers a full line of liquid flow control and liquid source vaporisation and control systems. A variety of vaporiser technologies are available from HORIBASTEC for different precursors. These include baking, direct injection and mixing to guarantee efficient and stable delivery of vapor to the point of use. Auto refill systems complete the line-up, offering uninterrupted, safe and reliable delivery of liquid precursors, increasing uptime and reducing operator handling and risk of process contamination.

Kemstream’s President, Jean Manuel Decams states, “we are very happy to collaborate with HORIBA. By taking Kemstream’s advanced direct liquid injection products and expertise and marrying with HORIBA’s experience and strong global network we feel that the wider market will have better access to Kemstream’s cutting edge direct liquid injection technology”.

Kemstream’s latest innovation is the Vapbox series, a wide range of high-performing direct liquid injection (DLI) vaporizers. Vapbox DLI vaporizers feature a proprietary injection-atomization technology and an optimized vaporization chamber design which allow them to perform reliable, accurate and repeatable vaporization of liquid and dissolved solid compounds and precursors. The Vapbox range generates pure vapors for every application that requires a reactive gas phase that has to be obtained from liquid or solid compounds and precursors. These applications include CVD (Chemical Vapor Deposition) and ALD (Atomic Layer Deposition) processes.

KEMSTREAM develops and manufactures innovative advanced Direct Liquid Injection (DLI) vaporizers for demanding CVD, MOCVD, and ALD processes and precursors. KEMSTREAM products address research and development, pilot and production applications for diverse markets including semiconductor, glass and PV industries. Website:

HORIBA provides an extensive array of analytical instruments and systems for applications ranging from automotive R&D, process and environmental monitoring, in-vitro medical diagnostics, semiconductor manufacturing and metrology, to a broad range of scientific R&D and QC measurements. HORIBASTEC is a wholly owned subsidiary of HORIBA famous for mass flow controllers, compact direct injection devices and automatic refill systems for the semiconductor, photovoltaic and LED industries.