In-Situ / In-Line Ellipsometers

In-situ spectroscopic ellipsometers allow real-time monitoring and control of thin film deposition and etch processes with sub-monolayer resolution. It provides real-time calculation of film thickness, optical constants, and composition of thin film stacks in different ambient. The design of the ellipsometric heads facilitates the attachment to the process chamber or roll-to-roll system.

UVISEL In-Line Spectroscopic Ellipsometer

UVISEL Spectroscopic Phase Modulated Ellipsometer는 in-line용 turn-key 박막 계측 장비로써, 박막의 두께와 광학상수의 분석을 지원한다.

UVISEL Plus In-Situ Spectroscopic Ellipsometer

UVISEL In-Situ Spectroscopic Ellipsometer는 process chambers(PECVD, MOCVD, sputter, evaporation, ALD, MBE)로의 설치가 용이하고, 빠른 측정 속도, 높은 감도와 정도를 가지고 있으므로 deposition / etch processes에서의 실시간 박막 두께 컨트롤이 가능하다.

Ellipsometry for Organic Webinar