
SEMICON West 2020
HORIBA Semiconducotor will exhibit at Virtual SEMICON West on the Jul. 20-23 2020. To view the products that will be exhibited please see the list of products below. Live features from July 20-23 and get continual 24/7 access to all programs and exhibitors for an additional 60 days.
Exhibited Products
Dry Process

Mass Flow Controller & Meter
Thermal Mass Flow Module
SEC-Z717SThermal Mass Flow Controller
SEC-Z500XDifferential Pressure Mass Flow Module
D517MG / D512MGThermal Mass Flow Module
SEC-Z712MGX / SEC-Z724MGXThermal Mass Flow Module
SEC-Z512MGXHigh Temperature Mass Flow Controller
SEC-8450F
Pressure controller
Auto Pressure Regulator
UR-Z712MBack side Wafer Cooling System
GR-314FBack side Wafer Cooling System
GR-317F
Liquid Source Vaporization System
Mixed Injection System
MV-2000Differential Pressure Liquid Mass Flow Meter
XF-122Direct Injection System
VC-Series
Gas Monitor
Vapor Concentration Monitor
IR-312MCompact Process Gas Monitor
Micropole SystemGas Monitor
IR-400
Plasma Process Monitor
Interferometric Camera and Endpoint Detector
LEM CTOptical Emission Spectroscopy based sensors and Endpoint Detector
EV 2.0 SpectrometersInfrared Thermometer
IT-470F-H
Wet Process & Waste water

Chemical Concentration Monitor
Optical Fiber Type Hot Phosphoric Acid Concentration Monitor
CS-620FNon-Contact Chemical Concentration Monitor
CS-900Chemical Concentration Monitor
CS-100 SeriesHigh Precision, High Stability Chemical Concentration Monitor
CS-700Chemical Solution Concentration Monitor
CS-600F
HF Monitor
In-line Sensor & Auto Range Switching HF Concentration Monitor
HF-960EM/CM-520-1/4-A-P02Low-Concentration HF Monitor
HF-960M / FS-10F-3/4
TMAH Monitor
TMAH Concentration Monitor
HE-960H-TM-S / FES-510-3/4
Chemical Resistivity Meter
High Resistivity Meter
HE-Z-100T / ERF-001-L-S-ZResistance Meter
HE-960RW / ERF-01-L-H-N-Y-10M
Conductivity Meter
Flat Carbon Sensor Conductvity Meter
HE-960LF / FS-09FCarbon Sensor Conductivity Meter
HE-960HC / FES-510-3/4
pH Monitor
Micro Volume Sampling pH Monitor
UP-100Industrial pH Monitor
HP-200Hydrogen Peroxide Monitor
HZ-960HPO-M / ZH-100HPODO Meter
HD-960L / DO-100Phosphoric Acid Concentration Monitor
HE-960H-PASingle Wave Length Absorbance Meter
HA-100/HA-960
Materials Analysis
Raman Microscope
LabRAM SoleillTMUnmatched Visualization and Measurement of Nanoparticles
ViewsizerUV-VIS-NIR Spectrometer
OES StarM116 MultiTrack Spectrometer
PoliSpectra®Ultra-compact Scientific CMOS Camera
SylentTMSpectroscopic Ellipsometer
Uvisel PlusPlasma Profiling-Time of Flight Mass Spectroscopy
PP-TOFMSGlow Discharge Optical Emission Spectroscopy
GD-OES
Lithography
EUV measurement capability
PR-PD3 ProCompact Reticle/Mask Particle Detection System
PR-PD3EPCompact Reticle/Mask Particle Detection System
PR-PD3Reticle/Mask Particle Detection System
PR-PD2Reticle / Mask Particle Detection System
PR-PD2HRBlanks Mask Particle Detection System
PR-PD2BLILow-cost Reticle/Mask Particle Detection System
PR-PD5Reticle/Mask Particle Remover
RP-1