CS-600F

Fiber Optic Type Chemical Concentration Monitor CS-600F

Fiber Optic Type Chemical Concentration Monitor

An optical fiber-based chemical concentration monitor designed to measure chemicals used in semiconductor manufacturing processes such as cleaning and etching.

Measurements of high-temperature chemicals essential for cutting-edge wet processes can be achieved.  Enabling quick, stable, and space-saving solutions, leading to the optimization and increased precision of chemical management.

Chemical Concentration

DC24VTransmission OutputContact OutputRS-232CHigh TemperatureMulti Component

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Stable measurement of high-temperature chemicals

Due to superior optical systems and algorithmic procedures, it has become possible to obtain stable measurements of chemical solutions even under the conditions of high temperature (20−80℃) without the need for adjustments or further processing. Additionally, it does not require the operator to cool the chemicals.

Up to six types of chemicals (chemicals or ranges) are supported

Measurements of up to six types of chemicals (chemicals or ranges) are possible with a single monitor.  Desired types of chemicals or ranges can be freely specified for measurement, allowing for a wide range of measurement needs.

Free layout

With the flexibility to place and accommodate the installation space of chemical supply units or cleaning equipment, the light source unit and the monitor unit can be installed separately.

Reduced equipment downtime

By reducing the frequency of background adjustments in the inline measurements, equipment downtime is significantly reduced, greatly contributing to throughput improvement.

ModelCS-600F
Measurement
principle
Absorption spectroscopic method
Calculation
principle
Temperature compensation type multivariate analysis
Measurement targetNH3/H2O2/H2O (reperesentative specification)
* Please contact HORIBA regarding other chemicals.
Measurement rangeNH3:0.00~1.20mass%、H2O2:0.00~5.50mass%、
H2O:93.3~100.0mass%
RepeatabilityNH3:±0.05mass%、H2O2:±10mass%、H2O:±1.0mass%
Chemical temperature: Within ±1℃/1 hour
Sample solution
temperature
20〜80℃
Measurement cycleApprox. 3 seconds
LCD
display
(1) Measured value (%)
(2) Concentration alarm (HH/H/L/LL)
(3) Error code (EXXX)
(4) Chemical temperature (°C)
(5) Serial/parallel communication status (P/S)
(6) The times of background correction failure (CXXX)
Key input(1) Concentration alarm setting (HH/H/L/LL)
(2) Concentration value shift
(3) Background correction
(4) Hot water correction
(5) Temperature dependent concentration shift
Parallel
input
Input voltage of 12 V to 30 V DC by insulating with photo coupler
(1) Parallel concentration alarm output (On/Off)
(2) Switching chemical solution for measurement
(including background correction)
(3) Hot water correction
Parallel
output
Transistor output (NPN open collector) by insulating with photo coupler
Maximum current when powered ON: 5 mA DC (no internal protective resistance)
Maximum voltage when powered OFF: 30 V DC
(1) Concentration alarm (ON at HH/H/L/LL alarm)
(2) Monitor error (OFF at error)
(3) Measuring (ON at measurement)
(4) Chemical solution type for measurement
(5) Echo to hot water correction input
(6) Warning (ON at occurred)
(7) Background correction status 8) Hot water correction status
Serial inputRS-232C
(1) Request for readout of measurement data
(2) Select chemical solution type to be measured
(3) Hot water correction
Serial
output

RS-232C
(1) Measured data No.
(2) Chemical solution type
(3) Concentration value
(4) Error code
(5) Chemical temperature

Analog
output
4 mA to 20 mA
In case of monitor error occurs, measurement is stopped or
invalid chemical range is selected, the signal output is fixed at 1.5 mA. The load resistor must be 500 Ω maximum.
Chemical solution
temperature input
Terminal block inlet (terminal screw M3)
Platinum resistance temperature sensor: Pt100
(Three-conductor type, Class A) *Temperature sensor is not included.
Air
(for operation and purge)
Connection port: 4 mm O.D. quick joint,
Pressure: 0.2 MPa ±0.02 Mpa
Power source100~230V AC(Single-Phase)、50/60Hz
Power consumptionApprox. 85 VA
(transient electric current at the time of the start is excluded)
Weight(Monitor) Approx. 3.6 kg
(Lamp unit) Approx. 2.8 kg
(Sample cell) Approx. 1.2 kg
Ambient temperature(Monitor, Lamp unit) 20°C to 30°C
(Sample cell, Optical fiber) 20°C to 35°C
(Sudden temperature change should be avoided, within ±1°C/1 hour)
Ambient humidity(Monitor, Lamp unit, Sample cell) 40% to 70%
(Should be no dew condensation)
Slanting angle at installation(Monitor, Lamp unit) within ±1°
Optical fiberLength: 5 m, minimum bend radius: R 150 mm

Schematics


 

제품 문의

HORIBA제품의 자세한 정보를 원하시면, 아래의 양식에 내용을 입력을 부탁드립니다.

* 는 필수입력항목입니다.

Related products

CS-620F
CS-620F

광섬유형 고온 인산 농도 모니터

CS-900
CS-900

비접촉 화학물질 농도 모니터

HC-200F
HC-200F

현장설치형 불소이온측정기(4-Wire Transmission)

HC-300F
HC-300F

현장설치형 불소이온측정기(2-Wire Transmission)

HD-200
HD-200

현장설치형 용존산소측정기(4-Wire Transmission), 멤브레인형)

HD-200FL (Four-Wire Transmission, 광학식)
HD-200FL (Four-Wire Transmission, 광학식)

현장 설치형 용존 산소 측정기

HD-300
HD-300

현장설치형 용존산소측정기(2-Wire Transmission), 멤브레인 형)

HD-480
HD-480

용존산소측정기(4-Wire Transmission), 멤브레인 형)

HD-960L
HD-960L

저농도 용존 산소 모니터

HD-960LR
HD-960LR

용존 산소 농도 모니터

HE-200C
HE-200C

현장설치형 전기전도도계(4-Wire Transmission, 저농도용)

HE-200H
HE-200H

현장설치형 전기전도도계(4-Wire Transmission, 고농도용)

HE-200R
HE-200R

현장 설치형 전기저항계(4-Wire Transmission)

HE-300C
HE-300C

현장 설치형 전기전도도계 (2-Wire Transmission, 저농도용)

HE-300C-IS ( 방폭형 )
HE-300C-IS ( 방폭형 )

방폭형 설치 타입 COND meter ( Low concentrtion )

HE-300R
HE-300R

현장 설치형 전기저항계(2-Wire Transmission)

HE-480C
HE-480C

패널 장착형 전도도계(4-Wire Transmission, 저농도용)

HE-480C-GC
HE-480C-GC

카본 센서 전도도계 (저농도형)

HE-480H
HE-480H

패널 장착형 전도도계(4-Wire Transmission,저농도용)

HE-480H-DC24V
HE-480H-DC24V

판넬 장착형 전도도계(4-wire Transmitter , 고전도도용)

HE-480R
HE-480R

패널 장착형 저항계(4-Wire Transmission)

HE-960CA
HE-960CA

구연산 모니터

HE-960CW
HE-960CW

패널 장착형 전도도계(4-Wire Transmission, 2채널)

HE-960H-KOH
HE-960H-KOH

KOH 모니터

HE-960H-TM-S
HE-960H-TM-S

고정밀 TMAH 농도 모니터

HE-960HC
HE-960HC

카본 센서 전도도계 (고농도형)

HE-960HI
HE-960HI

패널 장착형 전도도계(4-Wire Transmission, 광역용)

HE-960LC
HE-960LC

카본 센서 전도도계

HE-960LF / FS-09F-1/2
HE-960LF / FS-09F-1/2

평탄 카본 센서 전도도계

HE-960RW
HE-960RW

패널 장착형 저항계(4-Wire Transmission, 2채널)

HE-960RW-GC(W)
HE-960RW-GC(W)

2-채널 저항률계

HF-700A
HF-700A

황산/과산화수소 모니터 (저농도)

HF-960EM
HF-960EM

인라인 센서 및 자동 범위 전환 농도 모니터

HF-SP-CU
HF-SP-CU

2-채널 고정밀 HF 농도 모니터

HO-480
HO-480

패널 장착형 ORP 미터 (4-Wire Transmission)

HP-200 (Four-Wire Transmission)
HP-200 (Four-Wire Transmission)

현장 설치형 pH Meter

HP-300
HP-300

현장 설치형 pH미터 (2-Wire Transmission)

HP-480
HP-480

패널 장착형 pH미터 (4-Wire Transmission)

HP-480PL
HP-480PL

패널 장착형 pH 미터(4-Wire Transmission, 펄스 비례 제어)

HP-480TP
HP-480TP

패널 장착형 pH 미터(4-Wire Transmission, 산업용 시분할 비례제어)

HP-960FTP
HP-960FTP

패널 장착형 pH 미터(4-Wire Transmission, 4 포인트 알람, 시분할 비례 제어)

HR-200
HR-200

현장 설치형 잔류염소 측정기 (4-Wire Transmission, Water flow beads)

HR-200RT
HR-200RT

현장 설치형 잔류 염소 측정기 (4-Wire Transmission, Rotating Type)

HR-480
HR-480

잔류 염소 측정기 (4-Wire Transmission)

HT-110
HT-110

총유기탄소 모니터

HZ-960
HZ-960

용해 오존 모니터

HZ-960HPO-M
HZ-960HPO-M

H2O2 모니터

IT-470F-H
IT-470F-H

빌트인 타입 적외선 온도계

IT-545 Series
IT-545 Series

고정밀 적외선 온도계 (휴대용)

LAQUA PH210
LAQUA PH210

Handheld pH/ORP/Temperature Meter

OPSA-150
OPSA-150

유기오염물질 모니터

SLIA-300
SLIA-300

고감도 실리카 분석기

SLIA-5000
SLIA-5000

실리카 측정기

TPNA-500
TPNA-500

자동 총질소/총인 측정기

TW-100
TW-100

자동 수질 측정장치

CS-620F
CS-620F

광섬유형 고온 인산 농도 모니터

CS-900
CS-900

비접촉 화학물질 농도 모니터

HU-200SS
HU-200SS

현장설치형 MLSS Meter (4-Wire Transmission)

HU-200TB-H
HU-200TB-H

현장설치형 탁도계 (4-Wire Transmission, High-sensitivity)

HU-200TB-IM
HU-200TB-IM

공정용 삽입형 SS/탁도 측정기

HU-200TB-W
HU-200TB-W

현장 설치형 탁도계 (4-Wire Transmission, For Wide Range)

HZ-960
HZ-960

용해 오존 모니터

HZ-960HPO-M
HZ-960HPO-M

H2O2 모니터

OPSA-150
OPSA-150

유기오염물질 모니터

TPNA-500
TPNA-500

자동 총질소/총인 측정기

U-50 Series
U-50 Series

다항목 수질 측정기

Corporate