TMAH 농도모니터 HE-960H-TM

개요

TMAH의 농도관리에 최적
HE-960H-TM은 반도체·액정 프로세스에서 이용할 수 있는 photoresist 현상액의 주성분인 TMAH(Tetra Methyl Ammonium Hydroxide)농도를 고정밀도로 측정합니다. 전용 센서 FES-510시리즈는 넓은 측정범위을 갖추고 있고 내구성이 높은 제품으로서 TMAH측정용에 최적입니다.
내약품성에 뛰어난 4극식 카본 센서 채용

기능

  • 넓은 측정범위
    소수점자동변경에 의한 TMAH농도 0.000∼10.00%까지 넓은 측정이 가능합니다.
  • 표시 범위 자동변환
    고농도로부터 저농도까지 표시 범위를 자동으로 변환합니다. 또한 유효한 전기전도율 분해능을 유지하면서, 변화를 모니터 하는 것도 가능합니다.
  • TMAH농도·전기전도율·온도 3종류의 측정이 가능
    TMAH농도에 대해서는, 각각의 온도특성 데이타에 근거해 온도를 보상하여 측정합니다. 그 밖의 약액이라도 전기전도율계로서 이용할 수 있습니다.
  • 내약품성 4극식 카본 센서 채용
    센서는 내약품성이 높은 유리 카본을 채용한 신형 4극식 유통형 센서FES-510시리즈를 채용.
  • 전송 출력 4채널
    4채널의 전송 출력을 탑재하고 있으므로, TMAH농도·전기 전도율·온도의 각각을 할당하는 것이 가능합니다. 또, 전류출력은 DC4∼20mA 혹은 DC0∼20mA로 선택할 수 있습니다.
  • DC24V 전원
  • RoHS대응

제조원 HORIBA Advanced Techno

사양

Indication Converter

Model

HE-960H-TM

Measurement method

4-electrode carbon flow-type conductivity measurement – concentration conversion

Sensor input

1-channel

Temperature sensor specifications

Platinum resistance 1000Ω/0ºC

Measuring range

TMAH concentration: 0 to 10%
Conductivity: 0 to 1000 mS/cm (Measurement range without temperature conversion)
Temperature: 0 to 100ºC (The number of decimals displayed can be selected from 1 and 2.)

Repeatability

Within ±0.5% of the full scale (in equivalent input)

Linearity

Within ±0.5% of the full scale (in equivalent input)

Transmission output

No. of outputs: 4
4 to 20 mA DC or 0 to 20 mA DC: I/O insulation type
Maximum load resistance: 900Ω
Transmission output range: Custom setting possible within measurement range
(Negative terminals of each transmission output channels are connected internally thus
have the same electric potential.)

Contact output

No. of outputs: 5
Alarm contact outputs: R1, R2, R3 and R4
Contact type: Relay contact, SPST
Contact rating: 240 V AC, 1A and 30 V DC, 1A (resistance load)
Contact function: Selectable between upper/lower limit operation (ON/OFF control),
delay operation, and hysteresis
Contact action:

 

  • Closed during control action (during error setting)
  • Opened during normal status (including power supply off)

Error alarm output (RF)
Contact type: Relay contact, SPDT
Contact rating: 240 V AC, 1A and 30 V DC, 1A (resistance load)
Contact function: Selectable from error, trouble warning and maintenance
Contact action: When connected between C and NO, the contact is closed when status is normal and opened when error is detected (including power supply off)
(Contact status is reversed for connection between C and NC.)
(R1, R2, R3 and R4, RF are for common use, respectively.)

Contact input

No. of inputs: 1
Contact status: Open collector no-voltage contact a
Contact function: Transmission output hold

Communications output

RS-485 input/output

Calibration function

Conductivity: Based on the specified compensation coefficient for the cell constant (parameter input)
Temperature: Calibrated by comparing with the reference thermometer

Transmission output Hold function

Selectable from the previous value hold and optional value hold (However, only the previous value hold is available during the maintenance mode.)

Self-diagnosis function

  • Sensor diagnosis (Short-circuit and disconnection of the temperature sensor)
  • Out of the measurement range
  • Converter error

Temperature compensation

  • TMAH specific temperature compensation
  • Input of optional temperature compensation coefficient (Reference temperature: 25ºC, Temperature coefficient: 0 to 3%/ºC)

Temperature compensation range

TMAH: 0 to 50ºC, Conductivity: 0 to 100ºC

Ambient environment

Temperature: -5 to 45ºC, Relative humidity: 20 to 85% (without condensation)

Power supply

24 V DC ±10%, 10 W (max.)

Protective structure

Panel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type)

Mass

Approx. 550g

Conforming standards

CE marking, FCC Part 15

Compatible sensors

FES-510 series (flow-type carbon sensor)

4-electrode carbon flow-type conductivity sensor

Model

FES-510-1/4

FES-510-3/8

FES-510-1/2

FES-510-3/4

FES-510-1

Liquid end material

Glass carbon (electrode), PFA (body), Kalrez® (seal)

Piping size

1/4 inch

3/8 inch

1/2 inch

3/4 inch

1 inch

Sample flow rate

0 to 2 L/min

0 to 8 L/min

0 to 10 L/min

0 to 15 L/min

0 to 25 L/min

Sample pressure range

0 to 0.5 MP for 5 to 50ºC, 0 to 0.1 MP for above 100ºC
For 50 to 100ºC, pressure range is plotted between 0.5 MPa and 0.1 MP as shown on the line graph (refer to diagram on the right)

Sample temperature

5 to 100ºC (Aqueous solution which boils at 100ºC)

Cable length

10 m (standard)

외형도

Dimensions of HE-960H-TM

관련 제품

TMAH Conductivity Meter HE-960TM

TMAH용 전기전도도계 HE-960TM은, 반도체·액정 프로세스에서 이용할 수 있는 photoresist 현상액의 주성분인 TMAH (Tetra Methyl Ammonium...