Blanks Mask Particle Detection System PR-PD2BLI

개요

The PR-PD2BLI enables fine particle detection down to 0.1μm and also boasts a multi-stage sorter plus full range of communication functions. High-throughput measurement is possible on blanks mask.

기능

  • High sensivity and high throughput
       0.1μm/5.5 min (142mm)
      0.15μm/2.75 min (142mm)
      0.2μm/33 sec (142mm)
  • Multi-loader/unloader correspondence

제조원 HORIBA

사양

Please contact us.

응용 프로그램

  • Measurement of particles on masks and reticle blanks in lithography process.
  • In-coming QA inspection and Routine inspection