Electronic Semiconductor Devices

The semiconductor industry is at the heart of the present society and undergoes regular and rapid changes. The improvement of device performances has mainly relied on the continuous decrease of the MOS dimensions. This miniaturisation involves complex phenomena that must be understood. In particular strain and interface effects, and development of new materials for future devices.

Typical applications include:

  • Transistors: HEMT, MOSFET, OTFT, CMOS
  • Memories: PZT, BST
  • Dielectrics
  • High k and low k materials
  • Photoresists, polymers
  • Data storage: GeSbTe, DLC

 The major advantages of spectroscopic ellipsometry for this application are:

    • Non destructive technique
    • Film thickness with sub-angstrom resolution