Mass Flow Control

HORIBA offers a wide variety of products for mass flow control in the form of controllers and meters, our large range includes both gas and liquid flow controllers so you are sure to find one that meets your requirements. All our mass flow control products offer high accuracy and a fast response time.

The range of gas flow controllers includes two types of sensors, pressure-based and thermal type and three types of control valves; choose from thermal, solenoid, or piezo-electric. Our products utilise various communication types including analouge, digital, DeviceNet™, PROFIBUS™, and EtherCAT® (depending on product models).

The liquid product line-up can measure and control flows from 0.01 g/min to 100 g/min.
The gas product line-up can measure and control gas flows from 0.02 ccm to 1000 lm.

Find out more about Mass Flow Control Meters here.
Find out more about the characteristics of a Digital Mass Flow Controller here.
Learn more about HORIBA's CRITERION D500 Digital Mass Flow Module here.

Top of the Range

Pressure Insensitive Mass Flow Module D500

The leading-edge, high performance pressure insensitive mass flow module installed with the differential pressure detection and the piezo actuator valve. Multi range/gas/pressure solution and G-LIFE Self-Diagnosis function.

Class Leading Performance

Pressure Insensitive Mass Flow Controller  SEC-Z700X

High performance thermal sensor pressure insensitive mass flow module installed with piezo actuator valve. High reliability and all metal.

Best Selling

Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X Series

The best-selling digital mass flow controller offering multi range/multi gas solutions. High accuracy, fast response, and compact size. All metal.

General Purpose (Digital/Analog communication)

Digital Mass Flow Controller SEC-N100 Series

For various industries. Wide range of communication, Digital/Analog, DeviceNet™, CC-Link®, PROFIBUS™ and EtherCAT®. Wide control range from 10 SCCM to 1000 SLM. All-metal.

R100 Mass Flow Controller

Digital Mass Flow controller focuses on non-semiconductor applications. Has digital (PROFIBUS) /analog communications, 24 VDC power supply, high accuracy +/- 1.0% S.P. with high performance Solenoid Valve, and Multi Gas/Multi Range function for the nine most popular gases used in the applications.

General Purpose (Analog communication)

Mass Flow Controller SEC-E Series

The reliable thermal sensor mass flow controller installed solenoid valve for a wide variety of industry. Wide control range from 10 SCCM to 200 SLM.

Mass Flow Controller SEC-400 Series

The economy mass flow controller installed with thermal valve.

High Temperature

High Temperature Digital Mass Flow Controller SEC-8000 F/D/E

The digital mass flow controller for high-temperature environment, from 15 ℃ to 120 ℃. Digital/Analog communication.


multi-function control unit

This multi-function control unit is equipped with a program setting function, preset function, and integrating function. The front panel simplifies operation.


The PE-D20 control unit integrates high frequency functions via the front panel controls.


The PE-D10 is a standalone unit for use with mass flow meters.


The PE series of dedicated power sources can be used as drive power sources for mass flow controllers, meters, and auto pressure regulator as well as for dedicated display units, and supply the standard flow rate setting voltage. The series includes a lineup of models that have flow rate alarm output function, models offering 0 signals and 4 to 20mA, and models that are capable of driving up to six units.

Display unit DU series

The DU-102E and DU-103K display the flow rate output signal from mass flow controllers and meters. Matching these units to the full-scale flow rate values of mass flow controllers and meters enables direct monitoring of control and measured flow rates.

MFT20 mass flow controller tester image

The MFT-20 mass flow checker is a useful tool for equipment engineers to prove a fault with a mass flow controller before removing it.

* Devicenet is a trademark of Open DeviceNet Vender Association.
   PROFIBUS is a trademark of PROFIBUS International.
   EtherCAT is a trademark of Beckhoff Automation GmbH, Germany.