Процесс производства кристаллического кремния и продукция HORIBA, применяемая в ходе этого процесса.

Crystaline Silicon Impurity Control Material Analysis DI Water Analysis/Waste Water Monitoring Film Deposition Process Control/Thin Film Analysis Fluid Control Chemical Solution Monitoring

Сопутствующая продукция

Различные этапы процесса производства кристаллического кремния перечислены ниже. Выберите этап, чтобы увидеть список продукции, предлагаемой для этого этапа.


EMGA-930 is a simultaneous Oxygen/Nitrogen/Hydrogen Analyzer with high accuracy and repeatability suited to advanced R&D as well as quality control. It determines the O/N/H contained in ferrous and non-ferrous metals, ceramics, new materials, electronic materials and other inorganic materials using the inert gas fusion method.

Ultima Expert

The Ultima Expert is specially designed to handle the most challenging applications and offers the highest performance on the market with unrivaled resolution, high sensitivity and unique stability.


Single point analysis and automated hyperspectral imaging.

Dual vacuum modes.

Spot sizes from 1.2 mm to 10 µm.

LabRAM HR Evolution Raman Microscope

High spectral resolution analytical Raman microscope for ultimate performance and flexibility; includes UV Raman configuration, full automation and wide range of accessories.


Single point analysis and automated hyperspectral imaging.

Dual vacuum modes.

Spot sizes from 1.2 mm to 10 µm.

2-channel Carbon Sensor Resistivity Meter HE-960RW-GC(W)

Resistivity meter having the 2-channel carbon sensor. Measurement range: 0 - 100.0 MΩ・cm

2 channel Sanitary conductivity meter HE-960CW product photo

Measures the conductivity ranging from purified water up to 2000 µS/cm for pharmaceuticals, food, and cosmetics applications

Highly Sensitive Silica Monitor SLIA-300

Measure the ultra-low density of silica at the finest sensitivity of 0.01 µg/L (0.01 ppb).

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The GD-Profiler 2™ provides fast, simultaneous analysis of all elements of interest including the gases nitrogen, oxygen, hydrogen and chlorine. It is an ideal tool for thin film characterization and process studies.

Compact Process Gas Monitor MICROPOLE System

Compact process gas monitor using quadrupole mass spectrometer. Monitors trace gases, responds quickly to process shift . Easy to install and maintain.

POCl3 Auto Refill System VDM Series

HORIBA's Award Winning Fluid Delivery System (FDM Series) has revolutionised the POCl3 diffusion process by developing a system to automatically deliver bulk liquid POCl3. This Auto Refill System achieves higher uptime, cost reduction, improved process stability and higher safety.

Mixed Injection System Liquid Vaporizer MI-1000/MV-1000 Series

Vaporize liquid source stably by the gas-liquid mixture vaporization method. Can be used for low temperature and large flow production.

Liquid Auto Refill System LU Series

Automatic liquid refill system delivers chemicals directly to baking or direct liquid injection systems. Safe, efficient, and continuous supply of liquid sources.

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Анализатор концентрации газов

Vapor Concentration Monitor IR-300

In-line compact vapor concentration monitor, enables MOCVD precursor delivery to be stable.