HORIBA Advanced Techno, Co., Ltd. developed and began sales of the HD-960LR, a new dissolved oxygen monitor for semiconductor and semiconductor manufacturing equipment manufacturers, on July 1, 2021.
The recent miniaturization and enhanced performance of semiconductors is diversifying chemicals used in the semiconductor manufacturing process, each of which requires proper management. This new dissolved oxygen monitor continuously monitors the dissolved oxygen content of chemicals with great accuracy in the semiconductor manufacturing process. The addition of a new internal sensor mechanism can suppress electrolyte degradation and even expands compatibility to ammonia water and specific organic solvents. Moreover, the adoption of this new mechanism has realized the industry’s top-class sensor replacement cycle of roughly one-year. The HD-960LR extends the sensor life approximately 1.3 times for ultrapure water and 70 times for ammonia water compared to our conventional products. A longer interval between sensor replacements helps drive operational efficiency.
The HORIBA Group will continue to respond to broad customer needs to contribute to a higher yield rate in semiconductor manufacturing.
Background
Even the nanometer level contaminant in the semiconductor manufacturing process has the potential to cause semiconductor malfunctions. That is why the management of chemicals used in the semiconductor manufacturing process such as silicon wafer cleaning and etching surface treatments is extremely vital, in terms of yield enhancement. The recent miniaturization and enhanced performance of semiconductors is diversifying chemicals used in the semiconductor manufacturing process. This has led to the use of an increasing number of chemicals that are affected by oxygen dissolved in chemical solutions. In response to the needs of customers trying to tackle these issues, HORIBA developed the HD-960LR to expand compatibility to ammonia water and specific organic solvents and facilitate continuous and long-term monitoring of dissolved oxygen.
Main Specifications
| Name | New Dissolved Oxygen Monitor : HD-960LR |
| Measurement target | Dissolved oxygen concentration in water with a low concentration of ammonia (ammonia concentration of 1% or less; sample temperature 25°C±2°C) ＊1 |
| External dimensions | Dissolved oxygen sensor unit: 200 x 95 x 135 mm (W x H x D) Bottle unit: 179 x 211 x 123 mm (W x H x D) Converter: 96 x 96 x 115 mm (W x H x D) Case depth: Approx. 105 mm (with panel mounted) |
| Weight (main unit) | Dissolved oxygen sensor unit: Approx. 1.7 kg Bottle unit: Approx. 1.6 kg (excluding weight of internal fluid) Converter: Approx. 550 g |
| Sample temperature range | 20°C to 60°C |
