Carbon Sensor Conductivity Meter (High concentration type) HE-960HC


Can measures conductivity of high concentration. Its dual calculation circuits and software, combined with carbon sensors, enable measurements ranging without switching. The HE-960HC can be used as a process concentration meter, and also to monitor changes in the concentration of specified chemicals.


  • Wide range compatibility : 0 - 1000 mS/cm
  • Automatic display range switching 
  • Accommodates various types of temperature compensation 
  • Concentration conversion function  
  • Chemical resistant four-electrode carbon sensor

The HE-960HC is also an environmentally-friendly product that uses lead-free solder.

Manufactured by HORIBA Advanced Techno




Measurement range

0 - 1000mS/cm

Wetted materials

GC, Karletz, PFA

Sensor input

1 ch


+/- 0.5% of the full scale (in equivalent input)


+/- 0.5% of the full scale (in equivalent input)

Transmission output

Number of output: 4

Contact output

Outputs: 5 points

Communication output


Ambient environment

Temperature: -5 to 45°C, Relative humidity: 20 to 85% (without condensation)

Power supply

100 to 240 V AC ±10%, 50/60 Hz, 20 VA (max)

Protective structure

Panel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type)


Approx. 550 g

Conforming standards

CE marking, FCC Part 15

Compatible sensors

FES-510 series


Dimensions of HE-960HC


  • Management of chemicals and liquid waste in semiconductor and FPD manufacturing processes
  • Concentration monitor in the chemical blending tank


  • Technical Article

Conductivity Meter with Carbon Electrodes and Application for Densitometers Technologies for a Practical Densitometer (1.8MB)

"2-pole electrical conductivity sensors with chemical resistant carbon electrodes are developed in 2002. These sensors are installed in the semiconductor wet process and used as a densitometer practically. The electrical circuit for 4-pole measurement was an innovation which improved the interface problem to the any 4-pole sensors. Single component concentration of HF or TMAH is measured from the conductivity, based on the precise measurement of conductivity and temperature, via individual temperature compensation of conductivity. Etching or developing solution should be controlled severely. Needs for monitoring solution based on the application of conductivity method are increased."

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