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Home » Semiconductor Products Measurement Method Mass flow measurement Thermal sensor method

Mass flow measurement
Thermal sensor method

Digital Mass Flow Controller SEC-N100 Series

Digital Mass Flow Controller SEC-N100 Series

For various industries. Wide range of communication, Digital/Analog, DeviceNet™, CC-Link®, PROFIBUS™ and EtherCAT®. Wide control range from 10 SCCM to 1000 SLM. All-metal.

Pressure Insensitive Mass Flow Controller SEC-Z700X

Pressure Insensitive Mass Flow Controller SEC-Z700X Series

High performance thermal sensor pressure insensitive mass flow module installed with piezo actuator valve. High reliability and all metal.

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