Digital Mass Flow Controller SEC-N100 Series


For a wide variety of industries or applications. Can control wide range of full scale, from 10 SCCM to 1000 SLM, have various type of communications (digital/analog, DeviceNet™, CC-Link®, PROFIBUS™, and EtherCAT®, high accuracy (+/- 1.0% S.P. *1), and high-speed response. Also having  multi-gas/multi-range function emphasize cost performance in your process.

*1 Excluding SEC-N17X Series

Visit our Mass Flow Controller Comparison page for assistance in choosing the right Mass Flow Controller to meet your requirements.


  • Wide range of control, from micro to large flow, 10 SCCM to 1000 SLM.
  • Wide variety of communications and power supply


Select communication mode

Select power supply

SEC-N102 series

Digital communication

▶RS485 F-NET Protocol

Analog communication



HORIBA'S lineup includes leased power supply PE series.

SEC-N104 series

DeviceNet™ communication

Conforming to ODVA standards

SEC-N105 series

CC-Link® communication

Analog communication

▶0 to 5VDC, 0 to 10VDC 4 to 20mA

Conforming to  CC-Link® standards 24VDC (13 to 32VDC)

SEC-N106 series

PROFIBUS™ communication

Analog communication

▶0 to 5VDC, 0 to 10VDC 4 to 20mA

Conforming to PROFIBUS™ standards 24VDC(13 to 32VDC)


EtherCAT® communication

Conforming to EtherCAT®  standards 24VDC

  • High S.P. accuracy:  +/- 1.0% S.P. (*1)
  • 1second high speed responce (*1)
  • Multi-gas, multi-range solution

*1 Excluding SEC-N17X Series

The multi-gas, multi-range system has made it possible for the user to change the type of gas or full-scale flow rate freely.

        Exclusive software allows the user to alter specification easily

Manufactured by HORIBA STEC


  • Integration into various manufacturing systems, including those for: semiconductors, LCDs, LEDs, photovoltaic cells, power semiconductors, optical fibers, coatings, etc.
  • General industries: control of burner gases, control of atmospheric gases, generation of mixed gases, measurement of ventilation volume, etc.
  • Research & development: equipment for performance evaluation of various gas sensors, catalysts, and combustors; biotechnology-related evaluation; etc.
  • Laboratories: gas flow controllers for various experiments, sampling gases, etc.