Gas pressure
High performance auto pressure regulator with installed pressure sensor and piezo actuator valve. Digital/Analog and DeviceNet™ communications.
High stability and accuracy pressure controller for back side wafer cooling in semiconductor manufacturing, installed piezo actuator valve and pressure sensor.
The UR series automatic pressure regulators are electronic regulators with high-precision pressure sensors and ...
The fast response piezo actuator valves are equipped with metal diaphragms and metal O-rings.
The EC-5000 series exhaust pressure controller can maintain a consistent pressure...
The exhaust pressure controller maintains pressure within a chamber at any desired level. Equipped the high-resolution stepper motor and butterfly valve.