• Skip to navigation
  • Skip to content
  • Home
  • About HORIBA
  • Investor Relations
  • Corporate News
  • Publications
  • To Our Stakeholders
  • Careers
  • Contact Us
HORIBA
Country/Region Selection
Site search
  • Automotive Test Systems
  • Process & Environmental
  • Medical
  • Semiconductor
  • Scientific
  • All Segment Product Browser
  • Products
  • Applications
  • Technical Resource Center
  • Process Control
  • News & Events
  • Global Support Network
  • About Us
  • Contact Us
  • Product Lines
  • Processes
    • Semiconductor Process
      • Material Analysis
      • Lithography Process
      • DI Water Analysis (Wet Process)
      • Material Analysis
        (Particulates Analysis & Defect Analysis)
      • Chemical Analysis (Wet Process)
      • Gas Control/Analysis (Dry Process)
      • Process Monitoring (Dry Process)
      • Thin Film Control/Analysis
      • CMP Process
      • Drain Water Analysis
    • FPD Process
    • Photovoltaic Process
  • Measuring Object
  • Measurement Method
  • Product Name
  • New Product Lines
Home » Semiconductor Products Processes Semiconductor Process Process Monitoring (Dry Process)

Process Monitoring (Dry Process)

Chemical Analysis (Wet Process) Front-end Process
Compact Process Gas Monitor MICROPOLE System

Compact Process Gas Monitor MICROPOLE System

Compact process gas monitor using quadrupole mass spectrometer. Monitors trace gases, responds quickly to process shift . Easy to install and maintain.

© 1996-2021 HORIBA, Ltd. All rights reserved.
  • Terms & Conditions
  • Privacy Notice
  • Accessibility
  • Sitemap
  • Search