• Skip to navigation
  • Skip to content
  • Home
  • About HORIBA
  • Investor Relations
  • Corporate News
  • Publications
  • To Our Stakeholders
  • Careers
  • Contact Us
HORIBA
Country/Region Selection
Site search
  • Automotive Test Systems
  • Process & Environmental
  • Medical
  • Semiconductor
  • Scientific
  • All Segment Product Browser
  • Products
  • Applications
  • Technical Resource Center
  • Process Control
  • News & Events
  • Global Support Network
  • About Us
  • Contact Us
  • Product Lines
    • Semiconductor Manufacturing
      Process Monitor
      • Film Thickness Monitor
      • End-point Monitor
      • Residual Gas Monitor
    • Gas Concentration Monitor
    • Chemical Solution Concentration Monitor
    • Ultra-pure Water Monitor
    • Particle Detection System
    • Thin Film Analyzer
    • Mass Flow Controller
    • Liquid Source Vaporization System
    • Pressure Regulator
    • Accessories
  • Processes
  • Measuring Object
  • Measurement Method
  • Product Name
  • New Product Lines
Home » Semiconductor Products Product Lines Semiconductor Manufacturing Process Monitor Film Thickness Monitor

Film Thickness Monitor

Real Time Interferometric Process Monitor DIGILEM-CPM-Xe/Halogen

Real Time Interferometric Process Monitor DIGILEM-CPM-Xe/Halogen - [CCD] External Light Source Interference Camera

Real Time Interferometric Process Monitor provides high precision detection of film thickness and trench depth during the etching/coating process.Interference occurs when monochromatic light hits the sample surface, resulting in...

Real Time Interferometric Process Monitor LEM-CT-670-G50

Real Time Interferometric Process Monitor LEM-CT-670-G50 - [CCD] Laser Interference Camera

Real Time Interferometric Process Monitor provides high precision detection of film thickness and trench depth during the etching/coating process.

Request Information (Semi)

© 1996-2021 HORIBA, Ltd. All rights reserved.
  • Terms & Conditions
  • Privacy Notice
  • Accessibility
  • Sitemap
  • Search