High temperature mass flow meter SEF-2000 series

Overview

A mass flow controller is a device that measures and controls the mass flow rate of fluids. Flow rate measurement of fluids generally uses either volumetric or mass flow rate. With volumetric flow rate measurement, the ambient temperature and pressure of the fluid being measured affect the volume, and accurate measurement requires correcting for any changes in the environment during the measurement process. With mass flow rate measurement, on the other hand, the mass (weight) of the fluid is measured, so there is no need to correct for changes in the measurement environment. Mass flow controllers are widely used as flow rate controllers in processes that demand high precision flow rate measurement and control, such as the semiconductor manufacturing process.

Features

  • thermal valve model
  • A proven record: Boasting a terrific record as a TEOS vaporization supply system, this series is the standard for use with the LSC series.

Manufactured by HORIBA STEC

Specifications

High temperature mass flow controllers / meters, suitable for applications upto 120°C. Click here for full specification

Schematics

schematics
schematics