HD-960L

Dissolved Oxygen Monitor in Low Concentration HF HD-960L

Dissolved Oxygen Monitor in Low Concentration

High stability measurement dissolved oxygen in low concentration HF. Automatically switches between three measurement ranges from μg/L to mg/L. Measurement range : 0 - 20.00 mg/L.

 

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
  • Automatic range-switching function
    Automatically switches between three measurement ranges from μg/L to mg/L, making measurement possible with the most suitable resolving power.
  • Standard installation of communication function (RS-485)
    It is possible to check measured value, change and control the settings in an instrumentation area apart from where the unit is used.
  • Easy-to-use calibration function
    The HD-960L has a function for zero electricity/zero gas calibration and span calibration.
  • Capable of measuring small samples
    Can take measurements at a minimum flow rate of 15 ml/min.

 

 

Model NameHD-960L
Measurement range RepeatabilityMeasurement rangeRepeatability
0.0 to 200.0 μg/L+/-1% FS
200 to 2000μg/L+/-1% FS
2.00 to 20.00mg/L+/-1% FS
Conditions measurement sampleSample Pressure0 to 0.1MPa
Sample flow rate15 to 200ml /min.
Sample temperature10 to 45 °C
Sample HF concentration0 to 5000ppm
Transmission output4-20mA, 4points
Contact output4 points
Power supplyDC24V +/- 10% 15W
Combined Sensor unitDO-100
Combined Sensor#5600
Sample inlet/outlet1/4 inch tube

Schematics

Request for Information

Do you have any questions or requests? Use this form to contact our specialists. * These fields are mandatory.

Related products

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
CS-700

High Precision, High Stability Chemical Concentration Monitor

CS-900
CS-900

Non-Contact Chemical Concentration Monitor

EG-100
EG-100

Washwater Monitoring System

EMGA-920
EMGA-920

Oxygen/Nitrogen Analyzer

EMGA-921
EMGA-921

Hydrogen Analyzer

EMGA-930
EMGA-930

Oxygen/Nitrogen/Hydrogen Analyzer

EMGA-Expert
EMGA-Expert

Oxygen/Nitrogen/Hydrogen Analyzers
(Flagship High-Accuracy Model)

EMGA-Pro
EMGA-Pro

Oxygen/Nitrogen/Hydrogen Analyzers (Entry Model)

HC-200F
HC-200F

Field-installation Type Simplified Fluoride Ion Concentration Meter(Four-Wire Transmission)

HC-200NH
HC-200NH

Field-installation Type Ammonia Nitrogen Meter(Four-Wire Transmission)

HC-300F
HC-300F

Field-installation Type Simplified Fluoride Ion Concentration Meter(Two-Wire Transmission)

HD-200
HD-200

Field-installation Type Dissolved Oxygen Meter (Four-Wire Transmission, Membrane Type)

HD-200FL
HD-200FL

Field-installation Type Dissolved Oxygen Meter (Four-Wire Transmission, Optical Type)

HD-300
HD-300

Field-installation Type Dissolved Oxygen Meter(Two-Wire Transmission, Membrane Type)

HD-480
HD-480

Panel-mount Type Dissolved Oxygen Meter (Four-Wire Transmission, Membrane Type)

HD-960LR
HD-960LR

Dissolved oxygen concentration monitor series for semiconductor manufacturing

HE-200C
HE-200C

Field-installation Type Electric Conductivity Meter (Four-Wire Transmission, For Low-concentration)

HE-200H
HE-200H

Field-installation Type Electric Conductivity Meter (Four-Wire Transmission, For High-concentration)

HE-200R
HE-200R

Field-installation Type Electric Resistivity Meter (Four-Wire Transmission)

HE-300C
HE-300C

Field-installation Type Electric Conductivity Meter (Two-Wire Transmission, For Low-concentration)

HE-300R
HE-300R

Field-installation Type Electric Resistivity Meter (Two-Wire Transmission)

HE-480C
HE-480C

Panel-mount Type Conductivity Meter (Four-Wire Transmission, For Low-concentration)

HD-200
HD-200

Field-installation Type Dissolved Oxygen Meter (Four-Wire Transmission, Membrane Type)

HD-300
HD-300

Field-installation Type Dissolved Oxygen Meter(Two-Wire Transmission, Membrane Type)

HD-480
HD-480

Panel-mount Type Dissolved Oxygen Meter (Four-Wire Transmission, Membrane Type)

HD-960LR
HD-960LR

Dissolved oxygen concentration monitor series for semiconductor manufacturing

HE-200C
HE-200C

Field-installation Type Electric Conductivity Meter (Four-Wire Transmission, For Low-concentration)

HE-200H
HE-200H

Field-installation Type Electric Conductivity Meter (Four-Wire Transmission, For High-concentration)

HE-200R
HE-200R

Field-installation Type Electric Resistivity Meter (Four-Wire Transmission)

HE-300C
HE-300C

Field-installation Type Electric Conductivity Meter (Two-Wire Transmission, For Low-concentration)

HE-300R
HE-300R

Field-installation Type Electric Resistivity Meter (Two-Wire Transmission)

HE-480C
HE-480C

Panel-mount Type Conductivity Meter (Four-Wire Transmission, For Low-concentration)

HE-480C-GC
HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HE-480H
HE-480H

Panel-mount Type Conductivity Meter (Four-Wire Transmission, For Low-concentration)

HE-480R
HE-480R

Panel-mount Type Resistivity Meter(Four-Wire Transmission)

HE-480R(W)
HE-480R(W)

Industrial resistivity meter

HE-960CA
HE-960CA

Citric Acid Monitor

HE-960CW
HE-960CW

Panel-mount Type Conductivity Meter (Four-Wire Transmission, 2-channel)

HE-960H-KOH
HE-960H-KOH

KOH Monitor

HE-960H-TM
HE-960H-TM

Wide range TMAH Concentration Monitor

HE-960H-TM-S
HE-960H-TM-S

High Precision TMAH Concentration Monitor

HE-960HC
HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

HE-960HI
HE-960HI

Panel-mount Type Conductivity Meter (Four-Wire Transmission, For Wide Range)

HE-960LC
HE-960LC

Carbon Sensor Conductivity Meter

HE-960LF / FS-09F-1/2
HE-960LF / FS-09F-1/2

Flat Carbon Sensor Conductivity meter

HE-960R-GC(W)
HE-960R-GC(W)

Carbon Sensor Resistivity Meter

HE-960RW
HE-960RW

Panel-mount Type Resistivity Meter(Four-Wire Transmission, 2-channel)

HE-960RW-GC(W)
HE-960RW-GC(W)

2-Channel Resistivity Meter

HF-960H
HF-960H

HF / HCl Concentration Monitor

HF-960M
HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HF-SP-CU
HF-SP-CU

2-channel High Precision HF Concentration Monitor

HO-200
HO-200

Field-installation Type ORP Meter (Four-Wire Transmission)

HO-300
HO-300

Field-installation Type ORP Meter (Two-Wire Transmission)

HO-480
HO-480

Panel-mount Type ORP Meter (Four-Wire Transmission)

HR-200
HR-200

Feild-installation Type Residual Chlorine Meter (Four-Wire Transmission, Water flow beads)

HR-200RT
HR-200RT

Field-installation Type Residual Chlorine Meter (Four-Wire Transmission, Rotating Type)

HR-480
HR-480

Panel-mount Type Residual Chlorine Meter (Four-Wire Transmission)

HT-110
HT-110

Total Organic Carbon Monitor

HZ-960HPO-M
HZ-960HPO-M

H2O2 Monitor

LAQUA DO210
LAQUA DO210

Handheld Dissolved Oxygen/Temperature Meter

LAQUA DO220
LAQUA DO220

Handheld Dissolved Oxygen/Temperature Meter

LAQUA DS-72
LAQUA DS-72

Benchtop Conductivity/Resistivity/Total Dissolved Solids/Salinity/Temperature Meter

LAQUA EC1100
LAQUA EC1100

Benchtop Water Quality Meters

Water & Liquid Corporate