PLATO Series Automatic Photoluminescence Mapping System

Automatic Photoluminescence Mapping System

PLATO-LED

Automatic Photoluminescence Mapping System

General Spec

Photoluminescence Mapping : Peak wavelength, Peak intensity, Integrated intensity, FWHM, Al contents in AlGaN layer

Thickness mapping : Thin-film thickness of GaN layer

Bow measurement (optional)

2”, 3”, 4”, 150mm, 200mm SEMI standard wafer

300mm SEMI standard wafer (optional)

3 lasers available : 213nm, 266nm, 325nm, 375nm, 405nm, 532nm, 980nm, 1064nm, etc.

Auto focus function to measure wafers of various thicknesses without modifying the measurement recipe

Excel, CSV export with flexible form

SECS/GEM, MES compatible

The most popular PL mapping system sold more than 250 units worldwide (9 countries, 63 customers)

Division: Metrology

Automatic Photoluminescence Mapping System

Automatic Photoluminescence Mapping System

Light source	UV	213nm, 266nm, 325nm
	VIS	375nm, 405nm, 532nm
	NIR	980nm, 1064nm
Measurement Item	DBR Measurement	Visible range, NIR range
Measurement Item	Bow Measurement	10~1000um
Laser Marking	CE-CoC, CE-DoC, KCs, S-Mark	Sapphire, Si, GaAs
Wafer Transfer	Robot type	Single-arm, Dual-arm
	Robot type	Cassette mapping sensor
	Wafer size	SEMI standard 2”, 3”, 4”, 6”, 8”, 12”
	Cassette type	Open Cassette, SMIF, FOUP
	Identification	Wafer ID reader, Cassette ID reader
Certification	CE-CoC, CE-DoC, KCs, S-Mark
Etc.	SECS/GEM

PLATO Series