| Model | PyroSense | PyroCurveSense / PyroCurveSense+ | PyroCurveSense++ | |
| Temperature | Range [°C] | 450 ~ 1,500 | ||
| Resolution [°C] | 0.1 | |||
| Accuracy [°C] | ±1.0 | |||
| Wavelength [nm] | 950 ± 5 | |||
| Sampling rate [Hz] | 1,000 | 50,000 | ||
| Reflectivity | Wavelength [nm] | 405, 633, 950 ± 5 | ||
| Range [%] | 0 ~ 100 | |||
| Resolution [%] | 0.1 | |||
| Accuracy [%] | ±1.0 | |||
| Growth rate Accuracy [%] | ±1.5 | |||
| Sampling rate [Hz] | 1,000 | 50,000 | ||
| Curvature | Range [km-1] | – | -1,400(concave) ~ +2,000 (convex) | |
| Resolution [km-1] | – | 2.0 | ||
| Accuracy [km-1] | – | ±1.0 | ||
| General | RPM [rpm] | 5 ~ 120 | 100 ~ 1,200 | |
| Power [V] | AC 110~220 (50/60Hz) | |||
| Dimension [mm] (W X H X D) | Head : 35X34X93 Controller : 250X300X90 | Head 1 : 35X34X93 Head 2 : 157X58X134 Controller : 250X300X90 | Head 1 : 35X34X93 Head 2 : 95X58X134 Controller : 250X300X90 | |
| Weight [kg] | Head : 0.6 Controller : 3.0 | Head 1 : 0.6 Head 2 : 2.0 Controller : 3.0 | Head 1 : 0.6 Head 2 : 1.5 Controller : 3.0 | |
PyroSense Series
In-Situ Monitoring System
The PyroSense Series is an in-situ monitoring system for epitaxial growth processes in MOCVD/MBE. It enables inline monitoring of temperature, film thickness (growth rate), and warpage during deposition processes. As an in-situ monitoring tool for deposition equipment such as CVD, MBE, and ALD, it measures temperature via real-time emissivity, warpage via reflectivity, and film thickness (growth rate).
Product Line
| Model | Temperature | Reflectivity | Curvature |
| PyroSense | O | O | X |
| PyroCurveSense | O | O | O |
| PyroCurveSense+ | O (2 Ch) | O (2 Ch) | O |
| PyroCurveSense++ | O (3 Ch) | O (3 Ch) | O |
Segment: Semiconductor
Division: Metrology
General Features
• Application : MOCVD, MBE, Thermal CVD
• Materials : Si, Ga(Al, In)N, SiC, GaAs, InP
• Monitoring : Emissivity corrected temperature, reflectivity and curvature
• Reflectivity : Three different wavelengths : 405, 633, 950nm
• Analysis : Growth rate and thickness
• Multi-channel : Up to 3 optical heads
• User-friendly program interface