HE-960HC

碳感測器電導率儀(高濃度型)

高濃度電導率計非常適合半導體製造和 FPD(平板顯示器)製造過程中的化學溶液和廢水管理。

本裝置採用耐化學腐蝕的 4 極碳感測器。它無需實際切換即可進行大範圍測量,並配備濃度轉換功能,適合測量半導體清洗等製程中使用的多種化學品的電導率。

COND

DC24VTransmission OutputRS-485Single Component

事業部: Semiconductor
產品分類: Wet Process Control
製造商: HORIBA Advanced Techno Co., Ltd.

Wide-range Compatible

Capable of measuring up to 1000 mS/cm. (The measurement range of conductivity before temperature compensation)

Automatic Switching for Display Range

Automatically switching display range from high concentration to low concentration.  Furthermore, it is possible to monitor changes while maintaining effective conductivity resolution.

Concentration Conversion Function

Concentration conversion is possible by inputting the relationship between chemical  concentration and conductivity along with the temperature characteristics.

High Quality Chemical-resistant Sensor

A chemical-resistant 4-pole carbon sensor is in use, making it compatible with a wide range of chemical solutions used in semiconductor cleaning processes.

Model HE-960HC
Measurement range 0 - 1000mS/cm
Wetted materials GC, Karletz, PFA
Sensor input 1 ch
Repeatability +/- 0.5% of the full scale (in equivalent input)
Linearity +/- 0.5% of the full scale (in equivalent input)
Transmission output Number of output: 4
Contact output Outputs: 5 points
Communication output RS-485
Ambient environment Temperature: -5 to 45°C, Relative humidity: 20 to 85% (without condensation)
Power supply 100 to 240 V AC ±10%, 50/60 Hz, 20 VA (max)
Protective structure Panel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type)
Mass Approx. 550 g
Conforming standards CE marking, FCC Part 15
Compatible sensors FES-510 series

Schematics

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