HE-960HC

Carbon Sensor Conductivity Meter HE-960HC(High concentration type),HE-960LC

碳感測器電導率儀(高濃度型)

高濃度電導率計非常適合半導體製造和 FPD(平板顯示器)製造過程中的化學溶液和廢水管理。

本裝置採用耐化學腐蝕的 4 極碳感測器。它無需實際切換即可進行大範圍測量,並配備濃度轉換功能,適合測量半導體清洗等製程中使用的多種化學品的電導率。

COND

DC24VTransmission OutputRS-485Single Component

事業部: Semiconductor
產品分類: Wet Process Control
製造商: HORIBA Advanced Techno Co., Ltd.

Wide-range Compatible

Capable of measuring up to 1000 mS/cm. (The measurement range of conductivity before temperature compensation)

Automatic Switching for Display Range

Automatically switching display range from high concentration to low concentration.  Furthermore, it is possible to monitor changes while maintaining effective conductivity resolution.

Concentration Conversion Function

Concentration conversion is possible by inputting the relationship between chemical  concentration and conductivity along with the temperature characteristics.

High Quality Chemical-resistant Sensor

A chemical-resistant 4-pole carbon sensor is in use, making it compatible with a wide range of chemical solutions used in semiconductor cleaning processes.

ModelHE-960HC
Measurement range0 - 1000mS/cm
Wetted materialsGC, Karletz, PFA
Sensor input1 ch
Repeatability+/- 0.5% of the full scale (in equivalent input)
Linearity+/- 0.5% of the full scale (in equivalent input)
Transmission outputNumber of output: 4
Contact outputOutputs: 5 points
Communication outputRS-485
Ambient environmentTemperature: -5 to 45°C, Relative humidity: 20 to 85% (without condensation)
Power supply100 to 240 V AC ±10%, 50/60 Hz, 20 VA (max)
Protective structurePanel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type)
MassApprox. 550 g
Conforming standardsCE marking, FCC Part 15
Compatible sensorsFES-510 series

Schematics

留言諮詢

如您有任何疑問,请在此留下詳細需求或問題,我們將竭誠您服務。

* 這些欄位為必填項目。