We have launched our new product the HF/HCl Concentration Monitor HF-960H for the semiconductor wet processes.

1 December 2008

Ideal for measuring high concentrations of hydrofluoric acid, hydrochloric acid, etc.
The HF-960H accurately measures concentrations of hydrofluoric and hydrochloric acid used in semiconductor manufacturing and other processes. Measurement is based on conversion to concentration from four-electrode conductivity measurements, so a wide range of measurements is possible, from low to high concentrations. The dedicated FES-510 series sensor is made from materials that are highly resistant to chemicals, making this unit ideal for the management of hydrofluoric and hydrochloric acid, even in high concentrations.


Information concerning products for use outside of Japan is provided on the group-wide website operated by the HORIBA Group.
Please discover HORIBA Advanced Techno products on HORIBA Semiconductor Segment website!