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Freeze dry

Bio Process

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Mass Flow Controller
Mass Flow Meter

Liquid Vaporization System

  • Mixed Injection
  • Baking System
  • Liquid Auto Refill System
  • Liquid Digital Mass Flow Controller

Auto Pressure Requlator

  • Auto Pressure Requlator
  • Piezo Valve
  • Exhaust Pressure Contoroller

Vacuum / Gas Monitor

  • Compact Process Gas Monitor
  • Capacitance Manometer
  • Gas Monitor
  • Vapor Concentration Monitor

Plasma Control

  • Plasma Emission Controller RU-1000

Fluid System

  • Mixed Gas Generators MU Series
  • Test Gas Generation System TU Series

Technical Information

Mass Flow Technology

21 Mar 2018 - HORIBA wins a 2018 iF DESIGN AWARD with its innovative VG-200 capacitance manometer

21 Mar 2018 - HORIBA, an OEM of instruments and measurement systems, has secured a prestigious iF DESIGN AWARD...

Read more

28 Feb 2018 - Atsushi Horiba Elected VLSI Research All-Star of the Chip-Making Industry for Management Contributions

28 Feb 2018 - HORIBA Semiconductor will be exhibiting at SEMICON China 2018

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