Pressure Control
High stability and accuracy pressure controller for back side wafer cooling in semiconductor manufacturing, installed piezo actuator valve and pressure sensor.
High performance auto pressure regulator with installed pressure sensor and piezo actuator valve. Digital/Analog and DeviceNet™ communications.
The fast response piezo actuator valves are equipped with metal diaphragms and metal O-rings.
The exhaust pressure controller maintains pressure within a chamber at any desired level. Equipped the high-resolution stepper motor and butterfly valve.
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