Design Method of PID Compensator by Internal Model Control

By: Atsushi IEKI

3 January 2016

Mass Flow Controllers (MFC) with thermal flow sensors are widely accepted in the semiconductor industry for the control of process gas flow. New semiconductor manufacturing technologies require MFCs to improve fast process gas flow response capability and response reproducibility to improve
throughput and yield. The design of control systems for MFCs is critical for speeding up the flow response, as well as maintaining constant responsiveness during the manufacture of MFCs. This paper proposes a method for designing a control system using Internal Model Control and shows the availability of the proposed method based on the experiment results.

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