Development to Ultra Thin MFC

By: Tadahiro YASUDA

24 November 2013

I introduce the efforts of miniaturization of the Mass Flow Controller (see Figure 1). It also leads to cost reduction solution and energy saving solutions, and high performance by reducing the unnecessary part. It is thought to be useful for new needs in the semiconductor process gas control. I introduce development of thinner mass flow controller which is main product of HORIBA STEC.

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