HORIBA STEC Products for Semiconductor Manufacturing Process

By: Takeshi KAWANO

30 January 2018

Figure 1 HORIBA Group products for semiconductor

Author Information: Corporate Officer & General Manager of Research &Development Division, HORIBA STEC, Co., Ltd.

Abstruct: HORIBA STEC, Co., Ltd., marketed the purely domestic Mass Flow Controller (hereinafter referred to as “MFC”) for the first time in Japan in1980. After that, the SEC-400 series and SEC-4400 series of MFCs were released, and their performance and quality were recognized by customers of semiconductor manufacturing tool manufacturers and semiconductor device manufacturers all over the world. So far, we have continuously developed and commercialized MFCs required in semiconductor processes. Today, semiconductor process-related products offered by HORIBA STEC Co., Ltd., are not only limited to MFCs but are also used in the measurement and control of flow, pressure, and concentration around process chambers. To provide solutions to customers, the number of products we offer as modules and subsystems, as well as parts and components, is increasing.

Download PDF (1.8 MB)