Industrial In-line and Multi Component Monitor Using Absorption Spectroscopy and Its Application

By: Yoko NAKAI

30 January 2018

Figure 1 Structure of CS-100 series

Author Information: Application Development Dept., Research & Development Division, HORIBA Advanced Techno, Co., Ltd.

Abstruct: HORIBA’s CS-Series chemical concentration monitors that use ultraviolet (UV) and near-infrared (NIR) absorption spectroscopy are widely used in semiconductor wet processes, and make it possible to measure multiple components in line and in real time. The monitor can measure various types of samples, from general ammonia and hydrogen peroxide mixtures in semiconductor cleaning processes to 5-component chemistry including by-products from etching and metal ions in solutions, and things like CMP slurries including solid particles. This paper will introduce specific examples of applications.

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