Pressure Insensitive Mass Flow Module — SEC-Z700 Series —

By: Akito Takahashi

31 August 2011

Considering the gas-supply lines of semiconductor manufacturing equipment, demand has increased for the use of the system configuration from which line regulators, pressure sensors and filters are eliminated for the purposes of cost reduction and integration. We at HORIBA STEC have developed the SEC-Z700 series as a flow-rate control device that can support such system configurations. The following features are described in this article: higher precision in the actual flow rate; high-speed response (performance) for all specified flow rates; improved control of pressure fluctuation; a monitoring function that prevents any unexpected shutdown of the gas control system; and configuration software that allows the user to easily modify the specifications.

Download PDF (1.7 MB)