Real-time Measurement of Cp2Mg Vapor Concentration using Non-Dispersive Infrared Spectroscopy

By: Daisuke HAYASHI

30 January 2018

Figure 1 The infrared absorption spectrum of Cp2Mg measured by FTIR. The FTIR measurement system was Model: FG-100 provided by HORIBA Co., Ltd., with HgCdTe detector and 2.4 m optical path length.

Author Information: Development Design Dept. 3, HORIBA STEC, Co., Ltd., Ph.D.

Abstruct: Vapor concentration of bis-cyclopentadienyl magnesium, which is used for fabrication of gallium-nitride semiconductor devices such as blue light-emitting diodes, was measured by using non-dispersive infrared (NDIR) spectroscopy. Different from conventional NDIR measurements, infrared absorbance at 12.8μm corresponding to C-H bending motion was utilized. From the measurement results, it becomes obvious that the vapor concentration was largely different from the concentration calculated from the saturation vapor pressure, and that the concentration and its dependence on carrier flow rate could be varied according to bubbler bottles. In this article, the detail of measurement technology along with experimental results is described.

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