High Grade Mirrors for VUV and XUV Applications

Grating Info

Example of Toroidal Mirror:

Reference Shape Blank Size(mm) Useful Area(mm) Radius of Curvature Blank Roughness(nm) Slope Error(┬Árad)
545 70 038S Toroidal 50x250x50 20x230 R1 = 57 300
R2 = 93.1
Si 0.5 5
545 70 060S Toroidal 40x280x40 30x270 R1 = 328 360
R2 = 261.77
Si 0.5 5

Example of Cylindrical Mirror:

Reference Shape Blank Size(mm) Useful Area(mm) Radius of Curvature Blank Roughness(nm) Slope Error(┬Árad)
545 70 039S Cylindrical 60 x 300 x 60 30x280 R = 698 Si 0.5 5