Ellipsometers
See us at
- American Vacuum Society (AVS), November 6-11, Nashville, TN
- Materials Research Society (MRS) Fall, November 27-December 2, Boston, MA
Smart SE
Overview
Smart SE, Powerful and Cost Effective Spectroscopic Ellipsometer
The Smart SE from HORIBA Scientific is a versatile spectroscopic ellipsometer for fast and accurate thin film measurements. It characterizes thin film thickness from a few Angstroms to 20µm, optical constants (n,k), and thin film structure properties (such as roughness, optical graded and anisotropic layers, etc).
The spectral range from 450 to 1000nm is measured in a few seconds and ellipsometric data are analyzed using the DeltaPsi2 software platform. The software integrates two levels of software to fulfil both routine analysis with predefined recipes and advanced analysis with state-of-the art ellipsometric modelling.
The Smart SE ellipsometer is a cost effective thin film R&D tool with no compromise on features, and delivers research grade performance at an economical price. It provides an integrated vision system for accurate spot positioning, seven automated micro spots with size ranging down to a few tens of microns for measurement of small features, and the ability to measure the complete 16-element Mueller matrix in just a few seconds for the study of complex samples.
The flexible design of the Smart SE enables full automation of the sample stage and goniometer as well as in-situ use on process chambers. It matches any application or budget for a wide variety of application areas including microelectronic, photovoltaic, display, optical coatings, surface treatments and organic compounds.
Manufactured by HORIBA Scientific
Specifications
Standard Configurations | |
|---|---|
Spectra range: | 450nm to 1000nm |
Spectra resolution | Better than 3nm |
Light source | Combined Halogen and Blue LED |
Measurement time | <1sec to 10 sec |
Beam size | 75µm * 150µm, 100µm * 250µm, 100µm * 500µm, 150µm * 150µm, 250µm * 250µm, 250µm * 500µm, 500µm*500µm |
Angle of incidence | 450 to 900 by step of 50 |
Sample size | Up to 200mm |
Sample alignment | Manual 17mm height adjustement and tilt |
Dimensions | 100cm * 46cm * 23cm(W*H*D) |
Performances | |
|---|---|
Straight-through air accuracy | Ψ=450±0.050 Δ=00±0.20 |
Thickness accuracy on 1000 Å Oxide | 0.04% |
Thickness repeatability on 1000 Å Oxide | ±0.02% |
Options
- Automated angle of incidence from 450 to 900 by step of 0.010
- Motorized stage for 200mm and 300mm sample sizes
- In-situ adjustable flanges for mounting on process chamber
- Heating and cooling stages
- Liquid and electrochemical cells
- Cross hair auto-collimation system
