Thermal Mass Flow Module SEC-Z700S Series


Recognizing a market need for a device that has both EtherCAT® connectivity and a user-adjustable response, HORIBA has introduced the Z707S Series.

Based on the successful Z700 Pressure Insensitive model, the Z707S offers users improved accuracy and an operating range from 0.5% to 100% of full scale. Also, by applying a command signal, the response time can be adjusted anywhere from 300ms to one second, enabling a new level of process control. 


  • Tunable Response: 300mS to 1 second
  • Multi-Gas Multi-Range
  • Enhanced Flow Accuracy:
    +/- 1% Setpoint from 5-100% Full Scale, +/-0.05% Full Scale from 0.5-5%
  • Wide Dynamic Range: 0.5% to100%
  • Low Seat Leak Rate:  < 0.1% Full Scale
  • High Operating Temperature up to 60C
  • Actual gas accuracy: +/- 1% Setpoint from 10-100% Full Scale

Manufactured by HORIBA STEC