MFT20 mass flow controller tester image

The MFT-20 mass flow checker is a useful tool for equipment engineers to prove a fault with a mass flow controller before removing it.

Mass Flow Controller SEC-400 Series

The economy mass flow controller installed with thermal valve.

High Temperature Digital Mass Flow Controller SEC-8000 F/D/E

The digital mass flow controller for high-temperature environment, from 15 ā„ƒ to 120 ā„ƒ. Digital/Analog communication.

Exhaust pressure controller image

The EC-5000 series exhaust pressure controller can maintain a consistent pressure...

Wafer Back Side Cooling System GR-300 Series

High stability and accuracy pressure controller for back side wafer cooling in semiconductor manufacturing, installed piezo actuator valve and pressure sensor.

Exhaust Pressure Controller EC-5000 Series

The exhaust pressure controller maintains pressure within a chamber at any desired level. Equipped the high-resolution stepper motor and butterfly valve.

SEF-E series mass flow controllers

Low cost solenoid valve mfc's are suitable for flow control from 0.2sccm to 500slm N2 equivalent.

Mass Flow Controller SEC-E Series

The reliable thermal sensor mass flow controller installed solenoid valve for a wide variety of industry. Wide control range from 10 SCCM to 200 SLM.

Precision Soap Film Flow Meter

High precision flow rate measurement with one-touch operation.

Direct Injection System VC Series

The compact vaporization system does not require carrier gas, it can be used with either a liquid or gas flow meter, allowing for easy integration for direct liquid injection.