
Vacuum UV Spectroscopy
VUV Accessories
Based on modular designs, our VUV monochromators can be coupled with several accessories.
Source: Deuterium Lamp
The DLS200 is a 200W Deuterium lamp equipped with a MgF2 window to allow vacuum UV radiation down to 115 nm. This lamp is coupled with a mirror chamber to focus the beam on the entrance slit of a monochromator.
Applications:
- Fluorescence excitation
- Transmission/Absorption spectroscopy
- Monochromatic Semiconductor exposure
- Lithography
- Photo-chemical processes with high photon energy
Emission range | 115 – 350 nm |
Power | 200 W |
Window material | MgF2 |
Vacuum flange | DN50KF |
Cooling | Water cooled |
Arc diameter | 1 mm |
Operating emission angle | 14° |
Noise | Better than 0.1% @ 215 nm |
Drift | Better than 0.5% @ 250 nm |
Ignition voltage | 500 V |
Life time of the bulb | 300 hours at 1.8 A |
Heating up time | 30 s |
Overall length | 255 mm |
Weight | 0.9 kg |
Power supply | Included in the package |
UV Plasma sources

The UVS300 and UVS 10/35 are UV Plasma sources with high intensity, working with different gases.
Model | UVS 10/35 | UVS300 |
---|---|---|
Type | Plasma source | Duo plasmatron source |
Supported gases | He – H - Ne – Ar – Kr - Xe | He – H – Ne - Ar |
Power | 200 W | 300 W |
Vacuum flange | DN40CF | DN40CF |
Cooling | Air cooled | Water cooled |
Source point diameter | few mm | 50 µm |
Flux | 8.1015 photons/sr.s | 2.1016 photons/sr.s |
Overall length | 245 mm | 305 mm |
Weight | 3 kg | 12 kg |
Power supply | Included in the package | Included in the package |
Detection
- PMT in housing
- CCD detector
HORIBA Scientific can provide VUV detection solutions for your setup. Single or multichannel detectors are available, along with data acquisition modules compatible with our software. When delivered with our monochromator or spectrograph, we ensure the mounting, testing, calibration of the complete system and guarantee the vacuum level.
- PMT along with scintillator (salycilate window)
- XUV photodiodes
- Soft X-Ray camera
Sample chamber
Miscellaneous
- Mirrors chambers: mirror chambers are available to focus or collimate the beam in your setup.
- Filter wheels: filter wheels of filter sliders are also available.
