Raman

Raman Spectroscopy for Semiconductor Analysis

Raman spectroscopy has become an essential tool for semiconductor analysis due to its ability to probe material properties such as crystal quality, strain, stress, doping, and layer thickness at the microscale and even nanoscale.

To meet the evolving challenges in this field, HORIBA has developed advanced Raman spectrometers solutions tailored for semiconductor applications. These systems offer fast, automated, and precise analysis capabilities that are compatible with cleanroom standards and semiconductor manufacturing workflows, delivering both performance and flexibility for R&D and industrial environments.

What analysis are done on semiconductors with Raman spectroscopy?

Raman spectroscopy provides rich, multidimensional information about semiconductor materials and devices such as:

  • Stress and Strain Mapping: Peak position shifts reveal internal mechanical stress, critical for ensuring performance and reliability, especially in microelectromechanical systems (MEMS) and advanced packaging (e.g. TSVs).
  • Doping Level: The interaction between phonons and free carriers alters peak shapes, allowing quantification of doping levels, particularly in silicon and GaN.
  • Crystallinity and Phase Identification: Raman distinguishes between amorphous, polycrystalline, and single-crystal regions, as well as different material phases (e.g., cubic vs hexagonal SiC).
  • Layer Thickness and Uniformity: Raman spectroscopy can be used to estimate the thickness of certain semiconductor materials—particularly in layered or transferred 2D systems—based on interference effects or characteristic peak evolution.
  • Defect and Disorder Detection: Raman identifies non-uniformities and defects in films and wafers by detecting peak broadening or changes in peak intensity ratios.
  • Temperature and Thermal Properties: Peak shifts can also be correlated to local temperature, enabling contactless thermal mapping.
     

These characteristics are central to device quality, yield optimization, and understanding failure mechanisms.

>> Explore our solutions for Raman analysis <<

HORIBA Solutions for Semiconductor Analysis

HORIBA offers specialized Raman Spectrometers and platforms tailored to meet the stringent demands of semiconductor research and production:

LabRAM Odyssey Semiconductor

A high-performance Raman microscope designed specifically for semiconductor off-line metrology. It supports automated wafer mapping, in-plane and through-silicon analysis, and cleanroom integration.

LabRAM Soleil Raman Microscope

LabRAM Soleil

While not dedicated solely to semiconductors, the LabRAM Soleil’s ultra-fast imaging capabilities, intuitive software interface, and multiple excitation wavelengths make it an excellent tool for exploring strain effects, doping profiles, and heterostructure behavior in semiconductor R&D.

Additional resources about semiconductor analysis

Webinars

You may want to go deeper in semiconductor analysis with these:

Application notes

Science in Action articles

Other HORIBA solutions and resources for semiconductor analysis

Additional information about semiconductor analysis with other techniques is offered into the Semiconductor and Materials market pages.

Some of these technologies incorporate spectroscopy solutions such as:

  • Xtrology: Thanks to a Raman probe,this fully automated system enables high-throughput, non-contact Raman analysis of wafers with sub-micron precision. It integrates seamlessly into production lines for in-line quality control and advanced process monitoring.
     
  • Standard Microscopy Systems (SMS): The SMS system enables fast, non-contact measurement of stress, strain, and crystallinity in micro- and nanostructures, with a compact footprint suitable for integration into production tools or gloveboxes.

Products list

With decades of Raman expertise, global support, and continuous innovation, HORIBA empowers researchers and manufacturers to address the most complex semiconductor analysis challenges with confidence and precision.

LabRAM Odyssey Semiconductor
LabRAM Odyssey Semiconductor

Photoluminescence and Raman Wafer Imaging

LabRAM Soleil
LabRAM Soleil

Raman Spectroscope - Automated Imaging Microscope

XploRA™ PLUS
XploRA™ PLUS

MicroRaman Spectrometer - Confocal Raman Microscope

LabRAM Odyssey
LabRAM Odyssey

Confocal Raman & High-Resolution Spectrometer

SWIFT™
SWIFT™

Ultra Fast Raman Imaging for detailed Raman maps

NavMap Application
NavMap Application

Lets you navigate easily through your image

MultiPoints
MultiPoints

Automatic Acquisition of Raman Spectra at Multiple Positions

Si Stress
Si Stress

Automated Silicon Stress Analysis

Methods
Methods

Recall settings, and automate processes

ParticleFinder
ParticleFinder

Automated Particle Measurement, Identification and Classification using Raman Analysis

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