Carbon Sensor Conductivity Meter (High concentration type)
This unit employs a chemical-resistant 4-pole carbon sensor. It can measure across a wide-range without actually switching, and is equipped with a concentration conversion function, making it suitable for measuring the conductivity of a wide range of chemicals used in processes such as semiconductor cleaning.
Wide-range compatible
Capable of measuring up to 1000 mS/cm. (The measurement range of conductivity before temperature compensation)
Automatic switching for display range
Automatically switching display range from high concentration to low concentration. Furthermore, it is possible to monitor changes while maintaining effective conductivity resolution.
Concentration conversion function
Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with the temperature characteristics.
High quality chemical-resistant sensor
A chemical-resistant 4-pole carbon sensor is in use, making it compatible with a wide range of chemical solutions used in semiconductor cleaning processes.
| Model | HE-960HC | ||
|---|---|---|---|
| Measurement range | 0 - 1000mS/cm | ||
| Wetted materials | GC, Karletz, PFA | ||
| Sensor input | 1 ch | ||
| Repeatability | +/- 0.5% of the full scale (in equivalent input) | ||
| Linearity | +/- 0.5% of the full scale (in equivalent input) | ||
| Transmission output | Number of output: 4 | ||
| Contact output | Outputs: 5 points | ||
| Communication output | RS-485 | ||
| Ambient environment | Temperature: -5 to 45°C, Relative humidity: 20 to 85% (without condensation) | ||
| Power supply | 100 to 240 V AC ±10%, 50/60 Hz, 20 VA (max) | ||
| Protective structure | Panel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type) | ||
| Mass | Approx. 550 g | ||
| Conforming standards | CE marking, FCC Part 15 | ||
| Compatible sensors | FES-510 series | ||
Schematics
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