CS-700

High Precision, High Stability Chemical Concentration Monitor

This is a chemical concentration monitor capable of accurately measuring the concentration of each component in mixed solutions used in the semiconductor manufacturing processes.

Ideal for controlling multi-component chemicals, including trademarked chemicals. It contributes to enhanced quality control in semiconductor manufacturing processes while improving the accuracy of chemical management.

Segment: Semiconductor

Division: Wet Process Control

Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Compatible with multi-component chemicals
Accurate measure mixtures of up to eight components of chemicals can be taken.

Zero reagent requirements
Since component separation is accomplished through an optical measurement method without the need for reagents, it also contributes to cost reduction in the production process.

Measurement Range and Repeatability

Unit : mass%

	Component	Measurable range	Repeatability
1st solution	HNO₃	30.0 - 34.0	±0.5
	HF	2.00 - 4.00	±0.10
	H₃PO₄	35.0 - 39.0	±0.6
	H₂SiF₆	0.00 - 3.00	±0.50
	H₂O	25.0 - 33.0	±1.0

Conditions of measurement
1) Measurement interval: approx. 8 sec.
2) Moving average time :10 times
3) Atmospheric temperature, chemical temperature fluctuation: within +/- 1 degree C (period of time: 1hour). Sudden temperature change should be avoided
4) Condition of sample temperature: 20 to 30 degree C

Repeatability is the maximum deviation from average measured value over a 1 hour continuous measurement period.
The values in the above table are assigned analog output values between 4 - 20 mA. (makimum resistance of 500Ω)

Specifications Comparison with Previous Model

item	CS-100	CS-700
Measurement principle	Absorption spectroscopic method	Absorption spectroscopic method
Sample temperature	20 to 30 Degree C	20 to 30 Degree C
Ambient temperature	20 to 25 Degree C	20 to 30 Degree C
Components	Max. 4 components	Max. 8 components
Chemical range	Max. 4 ranges	Max. 6 ranges
Communication	Parallel I/O, Analog output, RS-232C	Parallel I/O, Analog output, RS-232C
Analog output (4-20 mA)	Max. 2 components	Max. 6 components
Dimension	205(W) X 329(D) X 269(H)mm	218(W) X 391(D) X 213(H)mm
Power source	DC 24V	DC 24V(Same connecter of CS-100)
Consumable parts	Halogen lamp	Halogen lamp (Same as CS-100 type)
Wavelength	UV/NIR	UV/NIR
Wetted material	PTFE, PFA, Sapphire or Quartz,	PTFE, PFA, Sapphire, Kalrez 4079 O-ring