Dissolved Oxygen Monitor in Low Concentration HF HD-960L

HF (Hydrofluoric Acid)  DO (Dissolved Oxygen) Monitor / Pure Water DO (Dissolved Oxygen) Monitor

This is a dissolved oxygen monitor designed for low-flow applications, ideal for monitoring the concentration of dissolved oxygen in HF solutions during wet processes.

Equipped with a range switching function that always measures in the optimal range/resolution for dissolved oxygen concentrations ranging from low to high, allowing it to adapt to the specific measurement requirements of each process.


DC24VTransmission OutputContact OutputRS-485Single Component

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Automatic range switching

Automatically switches between three measurement ranges, from μg/L order to mg/L order, enabling optimal resolution measurements.

Suitable for measuring small sample volumes

Can measure flow rates as low as 15 mL/min.

Simple calibration function

Equipped with zero calibration for electricity and zero/span calibration functions for gas.

Model NameHD-960L
Measurement range RepeatabilityMeasurement rangeRepeatability
0.0 to 200.0 μg/L+/-1% FS
200 to 2000μg/L+/-1% FS
2.00 to 20.00mg/L+/-1% FS
Conditions measurement sampleSample Pressure0 to 0.1MPa
Sample flow rate15 to 200ml /min.
Sample temperature10 to 45 °C
Sample HF concentration0 to 5000ppm
Transmission output4-20mA, 4points
Contact output4 points
Power supplyDC24V +/- 10% 15W
Combined Sensor unitDO-100
Combined Sensor#5600
Sample inlet/outlet1/4 inch tube


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