Wide range TMAH Concentration Monitor

A TMAH concentration monitor ideal for developer solution TMAH concentration management.

Featuring a highly chemical-resistant 4-pole carbon sensor, allowing the measurement of TMAH concentration, the main component of photoresist developer solutions, over a wide range.

CONDChemical Concentration

AC(100-240V)Transmission OutputContact OutputSingle Component

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Wide-range Compatibility

Measurement is possible in the TMAH concentration range of 0.000% to 10.00% with automatic decimal point adjustment.

Automatic Switching of Display Range

Automatically switches the display range from high to low concentration.  Furthermore, it is feasible to monitor changes while preserving effective conductivity resolution.

Sensor with Excellent Chemical Resistance

This sensor employs a chemically resistant 4-pole flow-through glass carbon sensor.

3 Measurements

Capable of three types of measurements: TMAH concentration, conductivity, and temperature.

Concentration Conversion Function

Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with the temperature characteristics.  It is particularly suitable for dilution management of low-concentration chemicals.

Indication Converter

Measurement range0 - 10%
Ambient environmentTemperature: -5 to 45°C, Relative humidity: 20 to 85 % (without condensation)
Power supply24 V DC ±10%, 10 W (max.)
Protective structurePanel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type)
MassApprox. 550 g
Conforming standardsCE marking, FCC Part 15
Compatible sensorsFES-510 series (flow-type carbon sensor)


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