HZ-960HPO-M

Dissolved Ozone Monitor HZ-960,H2O2 Monitor HZ-960HPO-M

H2O2 Monitor

A concentration monitor for hydrogen peroxide solutions used in the cleaning processes of semiconductors and solar cells to remove particles and metal ion impurities.

Capable of highly accurate measurements of hydrogen peroxide solution concentrations with a minimum resolution of 1 ppm, making it suitable for low-concentration chemical treatment.

H2O2

DC24VTransmission OutputContact OutputLow Concentration

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Abundance of measurement options

In addition to the standard measurement range of 0–1 mass% for hydrogen peroxide, there are three additional measurement ranges available.   Recommendations for the optimal range will be provided.

Choice of pipe sizes

In addition to the standard 3/4-inch size, 1/2-inch and 1-inch sizes can be chosen.

High reproducibility and stability accuracy are ensured.

The reproducibility accuracy is within FS+/- 0.2%.

Specifications of HZ-960HPO-M
Corresponding detectorZH-10HPOZH-40HPOZH-100HPOZH-500HPO
Measurement range0 - 1000 ppm0 - 4000 ppm0 - 1%0 - 5%
Supply temperature5 - 30 deg.C5 - 80 deg.C
Chemical contact material of detectorPFA, PTFE, quartz glass
Supply pressureWithin 0.5 MPa
Repeatability+/- 0.2% of full scale
Linearity+/- 1.0% of full scale
Transmission outputNumber of output: 2
Contact inputNumber of output: 5
Communication outputRS-485
Power supplyRated voltage 24 +/- 10% V DC, 15W

Schematics

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